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        Fabrication of ZnO Hexagonal Micropyramids by Using an rf-Magnetron Sputtering Method

        Shingo Komura,DaeGwi Kim,Shuji Wakaiki,Masaaki Nakayama 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.1

        We report on fabrication of self-assembled ZnO hexagonal micropyramids grown on a (0001) Al2O3 substrate by using an rf-magnetron sputtering method from the aspects of thier structural and optical properties. We found that the average size of the hexagonal micropyramids increases with increasing growth temperature. The re ection and the photoluminescence spectra at 10 K demonstrate high-quality optical properties for the total growth layer. Especially, for the growth temperatures of 650 ℃ and 700 ℃, fine structures are observable in the excitonic transitions in the re ection spectra. Furthermore, under high-density excitation conditions, photoluminescence bands originating from bi-exciton formation and from an inelastic scattering process of excitons, the so-called P emission, were observed. We report on fabrication of self-assembled ZnO hexagonal micropyramids grown on a (0001) Al2O3 substrate by using an rf-magnetron sputtering method from the aspects of thier structural and optical properties. We found that the average size of the hexagonal micropyramids increases with increasing growth temperature. The re ection and the photoluminescence spectra at 10 K demonstrate high-quality optical properties for the total growth layer. Especially, for the growth temperatures of 650 ℃ and 700 ℃, fine structures are observable in the excitonic transitions in the re ection spectra. Furthermore, under high-density excitation conditions, photoluminescence bands originating from bi-exciton formation and from an inelastic scattering process of excitons, the so-called P emission, were observed.

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