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High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork
Qiangxian Huang,Wenqian Wang,Guangpu Wang,Rongjun Cheng,Liansheng Zhang,Hongli Li,Ruijun Li 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.24 No.11
To realize the high-precision three-dimensional (3D) measurement of micro-precision devices, a 3D resonant trigger probe based on quartz tuning fork for micro/nano coordinate measuring machine (CMM) is proposed. The probe is composed of a quartz tuning fork, a tapered optical fiber stylus and a microsphere. It vibrates in resonance state and makes contact with the measured surface in the Z direction in tapping mode, while in the X and Y directions, it operates in friction mode. The 3D nano-positioning of the probe is achieved by the changes in resonance parameter caused by the interatomic force between the microsphere and the surface of the measured sample. In this study, the diameter of the probe microsphere can be as low as 80 μm, and the length of the probe stylus is approximately 5 mm. The trigger resolution of the probe in the X, Y and Z directions are 0.44, 0.41 and 0.34 nm, respectively. The probing forces in the X, Y and Z directions are 2.25, 1.81 and 4.24 μN, respectively. Experimental results verify that the proposed probe has the advantages of small size, sub-nano resolution and very low probing force. This probe can be used as the trigger probe of micro/nano CMM, which can be triggered by interatomic force.
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Liansheng Zhang,Shuang Hao,Pengcheng Zhang,Qiangxian Huang,Rongjun Cheng,Ruijun Li,Ping Wang 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.24 No.12
Piezoelectric actuators have been widely applied to precision positioning platforms. However, the positioning accuracy of piezoelectric ceramic has been significantly affected by its characteristics of hysteresis. Owing to the voltage-keeping feature of capacitive load for piezoelectric ceramic, this paper has proposed a switch-based driving in sequence method, which alternately drives each layer of PZT by using switches. Based on the driving in sequence method, the proposed method is capable of reducing the hysteresis to 1/N of the hysteresis under traditional voltage driving method, while significantly lowering the scale and cost of hardware, compared with the previous driving in sequence method. Thus, it allows for application to hundreds of layers of piezoelectric ceramic. According to experiment results, the hysteresis under different frequencies from 0.1 to 500 Hz for homemade seven-layer piezoelectric ceramic can be reduced from 12.5 to 2.1%. Furtherly, the residual hysteresis can be corrected by applying a simple quadratic-polynomial feedforward control, and the hysteresis is constrained within 0.8%, even with feedforward parameters that are not strictly calibrated. The dual-amplifier driving in sequence method proposed in this paper can significantly reduce the hysteresis in open-loop control of piezoelectric stack actuators, effectively improving the positioning and driving performance and saving cost.
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