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- 저자 : Nik Azmi N. A. Aziz (검색결과 1 건)
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Micropatterning of Spin-Coated Hybrid Materials by Using an UV Polymerization Technique
Aishah Isnin,Mat Tamizi Zainuddin,Nik Azmi N. A. Aziz,Mohamad Zahid A. Malek 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.52 No.5
Hybrid organic-inorganic materials are promising candidates and if their properties are tailored, several diffrent submicron planar optical passive and active devices, such as waveguides, ampli- fiers, splitters and couplers can be produced. In this present study, we report on sol-gel-derived organic-inorganic materials made from vinyltriethoxysilane (VTES). The lms were deposited on glass substrates by using a spin-coating technique. The lm densification was done at 300℃ and a patterned waveguide structure was fabricated by using UV-irradiation through a negative photomask. The SEM micrograph shows that channel patterns with a width of about 8 m were formed by etching of the unirradiated regions of the films. Hybrid organic-inorganic materials are promising candidates and if their properties are tailored, several diffrent submicron planar optical passive and active devices, such as waveguides, ampli- fiers, splitters and couplers can be produced. In this present study, we report on sol-gel-derived organic-inorganic materials made from vinyltriethoxysilane (VTES). The lms were deposited on glass substrates by using a spin-coating technique. The lm densification was done at 300℃ and a patterned waveguide structure was fabricated by using UV-irradiation through a negative photomask. The SEM micrograph shows that channel patterns with a width of about 8 m were formed by etching of the unirradiated regions of the films.
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