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Mengrui Liu,Da Yin,Baimei Tan,Fan Yang,Xiaoqin Sun,Pengcheng Gao,Shihao Zhang,Yazhen Wang 대한금속·재료학회 2021 ELECTRONIC MATERIALS LETTERS Vol.17 No.1
The adsorption and passivation reactions of 5-methyl benzotriazole (MBTA) with different copper samples (as received, citricacid treated and citric acid and KIO4treated) were studied. The experiments were characterized by contact angle measurement,potentiodynamic polarization curve, electrochemical impedance spectroscopy and X-ray photoelectron spectroscopy. The results showed that the adsorption behavior of MBTA on different treated surfaces was different and MBTA was preferentiallyadsorbed on the surface of citric acid treated copper. Based on the density functional theory, quantum chemicaldescriptors such as the frontier molecular orbital energies EHOMO,ELUMOand the energy gap between them, molecularelectrostatic potential, and Fukui function had been calculated and discussed. The adsorption mechanism of MBTA andcopper surface was further revealed, which had positive significance for the corrosion inhibition of copper surface in copperinterconnection CMP.
Mengrui Shi,Hao Li,Shipeng Li,Xuda Qin,Haitao Liu 대한기계학회 2023 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.37 No.11
This paper innovatively proposes a rapid prediction method for the stiffness the parallel kinematic mechanism (PKM) considering the geometric characteristics of the limb and the external loads with structural mechanics method. And the hybrid PKM named TriMule is taken as an example to demonstrate the correctness of the method by milling experiments of titanium alloy. In the slot milling, the deviation between the simulation of this method and experimental results of dimensional accuracy was only 0.21 %, and in the helical milling, the deviation was only 21 %. On this basis, the average stiffness index is proposed to evaluate the machining dimensional accuracy of the PKM, which is maintain at a high level around 10 5 -10 7 . The method proposed in this paper can predict the machining capacity of the PKM and the approximate machining deviation in working space, and provide a basis for the subsequent optimization of the cutting process parameters and working space.