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Effect of Substrate Temperature on the Physical Properties of Ni49.7Ti50.3 Thin Film Microactuator
Emad Kh. Al-Shakarchi,Matti N. Makadsi,Kadhum A. Essa 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.56 No.6
Shape memory alloy (SMA) NiTi thin films with thicknesses of about 5000 °A; have been prepared with composition of Ni49.7Ti50.3 at different substrate temperatures by using a thermal evaporation technique. The study concentrated on the influence of substrate temperature Ts and its effect on the reversible phase transition behavior of thin films through resistivity measurements. X-ray diffraction patterns of annealed samples for different substrate temperatures 100, 125, 150, and 200C exhibited an amorphous state for all samples except the one prepared at Ts = 200 C which showed an onset of crystallization. From the area of the hysteresis loop, one can estimate the amount of energy required for the reversible phase transition, austenite-martensite, and the data of I-V characteristic shows that the energy required for the phase transformation of each film depends on its substrate temperature.