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An Investigation into Physical Size Limitations of Microelectronic Chemical Sensors
Yeow, Terence C.W.,Haskard, Malcolm R.,Mulcahy, Dennis E. 경북대학교 센서기술연구소 1994 센서技術學術大會論文集 Vol.5 No.1
Microelectronic chemical sensors have paved the way for researchers to design and fabricate very large chemical sensor arrays with in-built electronic circuitry. Their extremely small dimensions, however, may pose a problem to their basic sensor characteristics, such as sensitivity and response time. In this paper, a preliminary investigation is undertaken to determine if there are any physical size limitations in implementing microelectronic chemical sensors to form a large sensor or biosensor array. Two types of microelectronic sensors were used in this investigation, thick film hybrid sensors and ion-sensitive field-effect transistors. Experimental results confirmed theoretical expectations that there are no physical size limitations in implementing these sensors in a large array.
Design of a New ISFET Array Chip
Yeow, Terence,Seo, Hwa Il,Mulcahy, Dennis,Haskard, Malcolm 한국센서학회 1995 센서학회지 Vol.4 No.4
A new ISFET array chip, based on detection of the threshold voltages of ISFETs by using an adjustable input, was designed. The chip includes 240 pH-ISFETs and circuitry such as comparators, a decoder and register. The chip has increased reliability, improved accuracy, digital output capability and the possibility of multisensor implementation. To fabricate the chip, an extended CMOS process was devised and implemented.