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Semi-Insulating 4~6-Inch GaAs Crystals Grown in Low Temperature Gradients by the VCz Method
P.Rudolph,M.Czupalla,Ch.Frank-Rotsch,F.Kiessling,M.Neubert,M.Pietsch 한양대학교 세라믹연구소 2003 Journal of Ceramic Processing Research Vol.4 No.2
The results of growth of semi-insulating GaAs crystals with diameters of 100-150 mm and lengths up to 200 mm from the melt with starting charges up to 25 kg by the low-temperature gradient Vapour Pressure Controlled Czochralski method (VCz) are given and compared with the state of art of LEC growth. The methodical process optimization was assisted by global numerical simulations. A slightly convex interface morphology has been found to be the most suitable for moderate EPD of ~104 cm-2 in 150-mm crystals whilst simultaneously depressing the probability of dislocation bunchings. The carbon concentration was controlled down to values below 1014 cm-3. Electrical properties, including the EL2° content, are discussed. The first results of GaAs VCz crystals grown without B2O3 encapsulant are given. A reduced boron concentration but enhanced carbon and vacancy concentrations have been observed.
Weiland, U.,Pietsch, J.,Hubner, M. Korean Society of Environmental Impact Assessment 1993 환경영향평가 Vol.2 No.2
Aims of the EXCEPT project and tasks and characteristics of the EXCEPT system are presented based on an analysis of urban planning EIAs. The methodology of evaluation in EIAs, which had to be developed in order to program the system, is based on a model of evaluation processes. Evaluation principles, evaluation rates, an environmental model and a model of the projects being planned are presented. The evaluation concern re-unifies the different components of evaluation again.
Weiland, U,Pietsch, J,Mubner, M 한국환경영향평가학회 1993 환경영향평가 Vol.2 No.2
Aims of the EXCEPT project and tasks and characteristics of the EXCEPT system are presented based on an analysis of urban planning EIAs. The methodology of evaluation in EIAs, which had to be developed in order to program the system, is based on a model of evaluation processes. Evaluation principles, evaluation rates, an environmental model and a model of the projects being planned are presented. The evaluation concern re-unifies the different components of evaluation again.