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Electrical conductivity enhancement of epitaxially grown TiN thin films
Khim Yeong Gwang,Park Beomjin,Heo Jin Eun,Khim Young Hun,Khim Young Rok,Gu Minseon,Rhee Tae Gyu,Chang Seo Hyoung,Han Moonsup,Chang Young Jun 한국물리학회 2023 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.82 No.5
Titanium nitride (TiN) presents superior electrical conductivity with mechanical and chemical stability and compatibility with the semiconductor fabrication process. Here, we fabricated epitaxial and polycrystalline TiN (111) thin flms on MgO (111), sapphire (001), and mica substrates at 640℃ and room temperature by using a DC sputtering, respectively. The epitaxial flms show less amount of surface oxidation than the polycrystalline ones grown at room temperature. The epitaxial flms show drastically reduced resistivity (~ 30 micro-ohm-cm), much smaller than the polycrystalline flms. Temperature-dependent resistivity measurements show a nearly monotonic temperature slope down to low temperature. These results demonstrate that high-temperature growth of TiN thin flms leads to signifcant enhancement of electrical conductivity, promising for durable and scalable electrode applications.