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Study on increasing output power density in ECF micropumps
Joon-wan Kim,Seiya Furuki,Shinichi Yokota,Kazuya Edamura 유공압건설기계학회 2015 유공압건설기계학회 학술대회논문집 Vol.2015 No.10
Electro-Conjugate Fluid (ECF) is a kind of functional and dielectric fluid. When a high DC voltage is applied to a pair of electrodes immersed in the ECF, a strong and active jet flow of ECF (ECF jet) is generated between these two electrodes. To satisfy high output power and easy fabrication at the same time, triangular prism and slit electrode pairs (TPSEs) for a novel ECF micropump was proposed and developed by MEMS technology based on photolithography with thick photoresist and nickel electroplating. In order to get higher output power density, this study proposes a new approach to efficiently remove dead volume and to increase density of electrodes for ECF jets. High density TPSEs proposed in this research were successfully fabricated by our MEMS technology. ECF micropupmps are realized with a base plate, a silicon rubber sheet, a cover plate and a device chip whose dimensions are 10 mm x 10 mm x 1 mm. Finally, this paper experimentally investigates ECF jet characteristics of the ECF micropumps. The experiment results show that our novel approach to increase output power density for ECF micropump is very effective.