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Design and fabrication of 2-DOF scanning mirror with Polydimethylsiloxane sloped electrode
J.Y. Jin(진주영),J.H. Park(박재형),B.W. Yoo(유병욱),Yun-Ho Jang(장윤호),I.H. Park(박일흥),Y.K. Kim(김용권) 대한전기학회 2009 대한전기학회 학술대회 논문집 Vol.2009 No.7
In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.