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      • Electrical properties of UV-irradiated thick film piezo-sensors on superalloy IN718 using photochemical metal organic deposition

        Hoshyarmanesh, Hamidreza,Ghodsi, Mojtaba,Park, Hyung-Ho Elsevier 2016 THIN SOLID FILMS - Vol.616 No.-

        <P><B>Abstract</B></P> <P>Lead zirconate-titanate thick films of perovskite structure Pb(Zr<SUB>0.52</SUB>Ti<SUB>0.48</SUB>)O<SUB>3</SUB> were fabricated on the curved surface of IN718 superalloy substrate using photochemical metal organic deposition technique. The films were heated at 200°C, irradiated by UV lamp (365nm, 6W) for 10min, pyrolyzed at 400°C, and subsequently annealed at 700°C for 1h after successive multi-step coating with 10wt.% excess PbO. Fairly smooth, dense, and crack-free polycrystalline thick films of Au/PZT/Au structure were deposited on IN718. The films were characterized to investigate the effect of photochemical deposition process and substrate on the crystalline, morphological, dielectric, ferroelectric and piezoelectric properties. Remanent polarization (<I>P</I> <SUB> <I>r</I> </SUB> =20.2μC/cm<SUP>2</SUP>), coercive field (<I>E</I> <SUB> <I>c</I> </SUB> =−10kV/cm), permittivity (<I>ε</I> <SUB> <I>r</I> </SUB> =324@1kHz), dielectric loss (<I>tanδ</I> ≈3%), and piezoelectric charge coefficient (<I>d</I> <SUB> <I>33</I> </SUB> =113.4pm/V) of the PZT thick film transducers were measured and interpreted as regards domain wall motions. Consequently, the photochemical grown lead zirconate-titanate thick film on the superalloy substrate IN718 was confirmed to be consistent to structural health monitoring due to its acceptable electrical response.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Lead Zirconate Titanate (PZT) thick films were deposited on curved IN718 and IN738. </LI> <LI> UV irradiated photochemical metal organic deposition (PMOD) was applied. </LI> <LI> UV photolysis results in ejection of organic ligands and controlling the grain growth. </LI> <LI> Electrical properties of dense and crack-free piezosensors were characterized. </LI> <LI> Integrated Au/PZT/Au structure could be applied for structural health monitoring. </LI> </UL> </P>

      • Thickness and thermal processing contribution on piezoelectric characteristics of Pb(Zr-Ti)O<sub>3</sub> thick films deposited on curved IN738 using sol–gel technique

        Hoshyarmanesh, Hamidreza,Nehzat, Naser,Salehi, Mehdi,Ghodsi, Mojtaba,Lee, Hong-Sub,Park, Hyung-Ho SAGE Publications 2015 Proceedings of the Institution of Mechanical Engin Vol.229 No.6

        <P>Lead zirconate-titanate (PZT) thick films of perovskite structure Pb(Zr<SUB>x</SUB>Ti<SUB>1-x</SUB>)O<SUB>3</SUB> were fabricated on the curved surface of IN738 nickel-based supper alloy substrate up to 15 µm thickness using sol–gel deposition technique without polyvinylpyrrolidone. The films were heated at 200 with 10 wt% excess PbO, pyrolyzed at 400, and subsequently annealed at 650, 700, and 800. Au and Pt thin films were deposited as bottom and top electrodes, respectively. PZT films of different thicknesses and thermal treatment conditions were characterized to investigate the effect of process on crystalline phase development, orientation, and microstructure morphology. Thereby, formation of fairly smooth, semi-dense, and crack-free random orientated thick films as well as an increase in the average grain size and stress relaxation was observed as the film thickness increased. Having optimized the coating process, intrinsic and extrinsic dielectric, ferroelectric and piezoelectric properties were measured as a function of the film thickness, orientation, grain size, and domain wall motions to evaluate the remnant polarization (<I>P<SUB>r</SUB></I> = 7.6–17.5 µC/cm<SUP>2</SUP>), coercive field (<I>E<SUB>c</SUB></I> = 2.5–4 kV/cm), permittivity (<I>ε<SUB>r</SUB></I> = 276–326), dielectric loss (tan<I>δ</I>(%) = 2.7–3), and piezoelectric charge coefficient (<I>d</I><SUB>33</SUB> = 71–145 pm/V) of the PZT thick films prepared potentially to be used as high bandwidth 1–5 MHz structural health monitoring transducers.</P>

      • KCI등재

        X-ray diffraction measurement of residual stress in sol-gel grown lead zirconate titanate thick films on nickel-based super alloy substrate

        Hamidreza Hoshyarmanesh,Naser Nehzat,Mehdi Salehi,Mojtaba Ghodsi 대한기계학회 2015 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.29 No.2

        Residual compressive stress of Pb(Zr0.52Ti0.48)O3 thick films was investigated using residual strains derived from X-ray diffraction patterns. Sin2ψ method was applied for the 5, 10 and 15 μm sol-gel derived thick films annealed at 700°C for 1 hr as high frequency structuralhealth monitoring square-shape transducers of 10×10 mm, deposited onto the curved nickel-based super alloy substrates. A triaxialmodel was proposed based on piezoelectric constitutive equations, and Bragg’s law at a large diffraction angle (~89º) was utilized consideringthe electromechanical coupling factor as well as elastic, dielectric and piezoelectric constants. Thickness variations led to a significantchange in residual stress magnitudes delineated from more-accurate triaxial model compared to small angle plane-stress resultsnot considering the piezoelectric coupling effects.

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