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Determination of Absolute Nitrogen Atom Density in Ar-N_2 ICP Discharge
강남준,오수기,Freddy Gaboriau,Andre Ricard 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.59 No.5
The absolute N atom density in low pressure Ar-N_2 inductively coupled plasma (ICP) is numerically studied with simple gas kinetic model using measured electron temperature and electron density. In the calculation we found the charge transfer between Ar^+ and N_2 is the dominant source of N atoms at higher pressure. The calculated results are compared with measured values using two-photon absorption laser-induced fluorescence (TALIF). We observed that at 200 mTorr N atom density decreases as the N_2 mixing ratio raises, while it is proportional to the N_2 at 20 mTorr.
Kang, Namjun,Britun, Nikolay,Oh, Soo-ghee,Gaboriau, Freddy,Ricard, André Institute of Physics [etc.] 2009 Journal of Physics. D, Applied Physics Vol.42 No.11
<P>In an argon ICP RF discharge modulated by 1 kHz square pulses, strong emission at 549.6 nm (corresponding to the upper level Ar(6d)) was observed about 100 µs after the pulse termination in the afterglow. This emission exceeds by a factor of as much as five the duty-on cycle intensity. With simple kinetic considerations, we assigned this emission to the Penning pooling ionization of argon metastable atoms leading to the formation of <img SRC='http://ej.iop.org/images/0022-3727/42/11/112001/jphysd311174in001.gif' ALIGN='MIDDLE' ALT='{\rm Ar}_{2}^{+} '/> in the afterglow followed by electron–ion recombination producing highly excited argon atoms Ar(6d). With the addition of 1% N<SUB>2</SUB> into Ar, the emission at 549.6 nm completely disappeared in the afterglow. This disappearance could be explained by excitation transfer between Ar metastable atoms and nitrogen molecules leading to the emission of the second positive system of N<SUB>2.</SUB>.</P>