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Static behavior of nano/micromirrors under the effect of Casimir force, an analytical approach
Hamid Moeenfard,Ali Darvishian,Mohammad Taghi Ahmaidan 대한기계학회 2012 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.26 No.2
In this paper, static behavior of nano/micromirrors under Casimir force is studied. At the first, the equilibrium equation governing the statical behavior of nano/micromirrors is obtained. Then energy method is employed to investigate statical stability of nano/micromirrors equilibrium points and a useful equation is suggested for successful and stable design of nano/micromirrors under Casimir force. Then,equilibrium angle of nano/micromirrors is calculated both numerically and analytically using the homotopy perturbation method (HPM). It is observed that with increasing the instability number defined in the paper, the rotation angle of the mirror is increased and suddenly,pull-in occurs. Since analytical results well follow the numerical ones, the presented analytical method in this paper can be used as a fast,precise and stable design tool in nano/micromirrors under Casimir force.