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      • KCI등재

        Fabrication and Application of Gel-Forming CeO2 Fixed Abrasive Tools for Quartz Glass Polishing

        Kaiping Feng,Binghai Lyu,Tianchen Zhao,Tao Yin,Zhaozhong Zhou 한국정밀공학회 2022 International Journal of Precision Engineering and Vol.23 No.9

        A gel-forming cerium dioxide (CeO2) fixed abrasive tool for quartz glass polishing was proposed to improve abrasive utilization. The effects of the solid content of polyvinyl alcohol (PVA) and phenolic (PF) resin on the mechanical properties, micromorphology, and friction properties of gel-forming CeO2 abrasive tools were analyzed. The effects of dispersant and coupling agents on the micromorphology of the gel-forming CeO2 abrasive tools were analyzed. The microstructure uniformity, hardness uniformity, and friction coefficient stability of the gel-forming and the hot pressing forming CeO2 abrasive tools were compared and analyzed. The polishing effects of the gel-forming CeO2 abrasive tools, hot pressing CeO2 abrasive tools and ceria slurry on quartz glass were compared. The results showed that when the solid content of PVA was 6 wt%, the solid content of PF was 8 wt%, the concentration of the PEI dispersant was 1 wt% and the KH550 coupling agent concentration was 1.5 wt%, the mechanical properties and friction performance of the gel-forming CeO2 abrasive tools is the best. Gel-forming abrasive tools were superior to hot pressing abrasive tools in terms of microstructure uniformity, hardness uniformity, and friction coefficient stability. The polishing experiments showed that after polishing by the gel-forming abrasive tool, the average surface roughness Ra reached 2.49 nm, which was better than polishing by the hot pressing abrasive tools and reached the polishing effect of ceria slurry. The flatness PV reached 0.660 µm, which was far better than that of ceria slurry.

      • KCI등재

        Study on the Fabrication and Grinding Performance of the Self-sharpening Cr2O3 Gel Abrasive Tool

        Kaiping Feng,Liang Zhao,Binghai Lyu,Lanxing Xu,Yanzhang Gu 한국정밀공학회 2024 International Journal of Precision Engineering and Vol.25 No.4

        This paper proposes a chromium oxide (Cr2O3) gel abrasive tool with the coated aluminum nitride (AlN) powder to give the tool with self-sharpening ability. The SiO2/AlN powder (S/A powder) is prepared through the sol–gel method. Effect of acetic acid solution content on the Tetraethyl orthosilicate (TEOS) hydrolysis reaction is explored. Effect of sintering temperature on the moisture resistance of the S/A powder are studied. The viscosity experiments, porosity tests, pre-grinding experiments and hardness tests are conducted to test the properties of the abrasive tool. The force–displacement curves are tested to evaluate the uniformity of the tool. The grinding effect on the sapphire substrate of tool with S/A powder, normal abrasive tool and tool with pore forming agent are compared. Results show that the SiO2 gel has great stability when the acetic acid solution content reached 0.6 g, and the gel does not crack after a week’s rest, which is suitable for the coating of the AlN powder. In the powder sintering experiment, 700 °C is found to be the optimal sintering temperature for the S/A powder preparation. The viscosity experiments show that the viscosity of the slurry will surge when the content of S/A powder reached 12 wt%, which impairs the uniformity of the gel abrasive tool. In the pre-grinding test, the abrasive tool with the S/A powder of 9 wt% shows great grinding stability, material removal rate (MRR) and wear resistance. The grinding experiments show that tool with S/A powder can achieve better surface quality and have a stable grinding process, and the glazing phenomena is ameliorated. After grinding, the average roughness Ra of the sapphire substrate reaches 1.57 nm and its flatness reached 0.725 μm. After chemical mechanical polishing (CMP), the average Ra of sapphire substrate reaches 0.64 nm and the scratch-free surface can be obtained.

      • KCI등재

        Effect of surface quality on hydrogen/helium irradiation behavior in tungsten

        Hongyu Chen,Qiu Xu,Jiahuan Wang,Peng Li,Julong Yuan,Binghai Lyu,Jinhu Wang,Kazutoshi Tokunaga,Gang Yao,Laima Luo,Yucheng Wu 한국원자력학회 2022 Nuclear Engineering and Technology Vol.54 No.6

        As the plasma facing material in the nuclear fusion reactor, tungsten has to bear the irradiation impact ofhigh energy particles. The surface quality of tungsten may affect its irradiation resistance, and even affectthe service life of fusion reactor. In this paper, tungsten samples with different surface quality werepolished by mechanical processing, subsequently conducted by D2þ implantation and thermal desorption. D2þ implantation was performed at room temperature (RT) with the irradiation dose of 1 1021D2þ/m2 by 5 keV D2þ ions, and thermal desorption spectroscopy measurements were done from RT to900 K. In addition, He irradiation was also performed by 50 eV Heþ ions energy with the fluxes of5.5 1021 m2s1 and 1.5 1022 m2s1, respectively. Results reveal that the hydrogen/helium irradiation behavior are both related to surface quality. Samples with high surface quality has superior D2þretention behavior with less D2 retained after implantation. However, such samples are more likely togenerate fuzzes on the surface after helium irradiation. Different morphologies (smooth, wavy, pyramids)after helium irradiati

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