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Mengrui Liu,Da Yin,Baimei Tan,Fan Yang,Xiaoqin Sun,Pengcheng Gao,Shihao Zhang,Yazhen Wang 대한금속·재료학회 2021 ELECTRONIC MATERIALS LETTERS Vol.17 No.1
The adsorption and passivation reactions of 5-methyl benzotriazole (MBTA) with different copper samples (as received, citricacid treated and citric acid and KIO4treated) were studied. The experiments were characterized by contact angle measurement,potentiodynamic polarization curve, electrochemical impedance spectroscopy and X-ray photoelectron spectroscopy. The results showed that the adsorption behavior of MBTA on different treated surfaces was different and MBTA was preferentiallyadsorbed on the surface of citric acid treated copper. Based on the density functional theory, quantum chemicaldescriptors such as the frontier molecular orbital energies EHOMO,ELUMOand the energy gap between them, molecularelectrostatic potential, and Fukui function had been calculated and discussed. The adsorption mechanism of MBTA andcopper surface was further revealed, which had positive significance for the corrosion inhibition of copper surface in copperinterconnection CMP.