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Processing, Structure, Properties, and Applications of PZT Thin Films
Izyumskaya, N.,Alivov, Y. -I.,Cho, S. -J.,Morkoç,, H.,Lee, H.,Kang, Y. -S. CRC PRESS LLC 2007 Critical Reviews in Solid State and Materials Scie Vol.32 No.3
<P> There has been a resurgence of complex oxides of late owing to their ferroelectric and ferromagnetic properties. Although these properties had been recognized decades ago, the renewed interest stems from modern deposition techniques that can produce high quality materials and attractive proposed device concepts. In addition to their use on their own, the interest is building on the use of these materials in a stack also. Ferroelectrics are dielectric materials that have spontaneous polarization in certain temperature range and show nonlinear polarization-electric field dependence called a hysteresis loop. The outstanding properties of the ferroelectrics are due to non-centro-symmetric crystal structure resulting from slight distortion of the cubic perovskite structure. The ferroelectric materials are ferroelastic also in that a change in shape results in a change in the electric polarization (thus electric field) developed in the crystal and vice versa. Therefore they can be used to transform acoustic waves to electrical signal in sonar detectors and convert electric field into motion in actuators and mechanical scanners requiring fine control. In a broader sense the ferroelectric materials can be used for pyroelectric and piezoelectric sensors, voltage tunable capacitors, infrared detectors, surface acoustic wave (SAW) devices, microactuators, and nonvolatile random-access memories (NVRAMs), including the potential production of one transistor memory cells, and applications requiring nonlinear optic components. Another set of potential applications seeks to exploit the ferroelastic properties in stacked templates where they are juxtaposed to ferromagnetic materials. Doing so would allow the control of magnetic properties with electric field, which is novel. Such templates taking advantage two or more properties acquired a new name and now goes by multiferroics. After a brief historical development, this article discusses technological issues such as growth and processing, electrical and optical properties, piezo, pyro, and ferroelectric properties, degradation, measurements methods, and application of mainly lead-zirconate-titanate (PZT = PbZr1-xTixO3). The focus on PZT stems from its large electromechanical constant, large saturation polarization and large dielectric constant.</P>
Structural Characteristics of Sputter-Deposited Pb(Zr,Ti)O3/ZnO Heterostructure Films
윤종걸,Ya. I. Alivov,F. Agra,B. Xiao,S. Chevtchenko,H. Morkoc 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.4
The structural properties of PbZr0:52Ti0:48O3 (PZT)/ZnO heterostructure films deposited on sapphire substrates by rf-sputtering were investigated using X-ray diffraction and atomic force microscopy for various deposition and annealing temperatures. Pure perovskite PZT films with smooth surface morphologies could be obtained by depositing the films at 650 ℃ and subsequent oxygen annealing at the same temperature. The post-annealing in oxygen also enhanced both the (111) orientation of the PZT films and the pyrochlore-to-perovskite phase transformation. The structural symmetry at the interface of PZT/ZnO heterostructures is discussed in conjunction with the crystalline orientations of PZT film, which favors (111)- and (110)-orientations of PZT films on (0001) ZnO during growth and the subsequent annealing process.