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Indium tin oxide nanorods by dc sputtering
M.K. Fung,Y.C. Sun,A.M.C. Ng,A.B. Djurišić,W.K. Chan 한국물리학회 2011 Current Applied Physics Vol.11 No.3
Growth of indium tin oxide (ITO) nanorods by sputtering without any use of templates or oblique angle deposition has been achieved. The morphology, optical and electrical properties of ITO nanorods obtained under different deposition conditions have been characterized. The deposition conditions resulting in high transmission and low sheet resistance have been determined. Dense ITO nanorod array has potential for application as a contact in light-emitting diodes
Indium oxide, tin oxide and indium tin oxide nanostructure growth by vapor deposition
M.K. Fung,K.K. Wong,X.Y. Chen,Y.F. Chan,A.M.C. Ng,A.B. Djurišić,W.K. Chan 한국물리학회 2012 Current Applied Physics Vol.12 No.3
Indium oxide, tin oxide and indium tin oxide nanowires have been grown by vapor deposition on Si and quartz substrates. Under the growth conditions used, pure SiOx nanowires, a mixture of SiOx and indium oxide, tin oxide or indium tin oxide nanostructures, or pure indium oxide, tin oxide or indium tin oxide nanostructures could be obtained at different substrate temperatures. The growth mechanism of the obtained nanostructures at different substrate temperatures is discussed. Optical and electrical properties of the deposited pure indium oxide, tin oxide or indium tin oxide nanostructures have been measured, and low sheet resistances on quartz substrates have been obtained for indium oxide and indium tin oxide nanostructures.