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후지모토 이쿠마츠(Ikumatsu Fujimoto),이태용(Lee Taeyong) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.5
When an almost flat surface under test is measured by an interferometer, the measurement result is largely influenced by systematic errors that include geometrical errors of a reference flat surface. To determine the systematic errors of the interferometer by the conventional method that is called the three flat method, we must take the reference flat surface out from the interferometer and measure it. Because of difficulties to set the reference flat surface to the interferometer exactly and quickly, this method is not practical. On the other hand, the method that measures a surface under test with some shifts in the direction being perpendicular to the optical axis of the interferometer is studied. However, the parasitic pitching, rolling and up-down movement caused by the above shifts brings serious error to the measurement result, and the algorithm by which the influences can be eliminated is not still established. In this paper, we propose the self-calibration algorithm for determining the systematic errors that include geometrical errors of a reference flat surface by several rotation shifts and a linear shift of general surface under test, and verify by a numerical experiment that this algorithm is useful for determining the systematic errors.
광학식 장거리 계측을 위한 다중영점 광빔의 영점 배치에 관한 기초 이론
후지모토 이쿠마츠(Ikumatsu Fujimoto),사토 세이치(Seichi Sato),쿠리하라 토루(Toru Kurihara),안도 시게루(Sigeru Ando),김민영(Min Young Kim) Korean Society for Precision Engineering 2010 한국정밀공학회지 Vol.27 No.3
Multizeros(multiple order zeros) optical beams which belong to the Laguerre-Gaussian beams, have rotational phase and conically-shaped amplitude structures around multizeros points in their phase and amplitude profiles, respectively. Especially, they have their own characteristics that the multizero points do not vanish over free-space propagation.Therefore, they are expected to be adequate for the applications of long-range optical measurement by using their multizero points as optical markers for the deformation sensing. In this paper, fundamental properties of multizeros optical beams for long-range optical measurement applications are investigated and clarified. In particular, the mathematical investigations are described on the characteristics of multizeoros optical beams such as (1) separation of a multizero into isolated single order zeros, (2) topological charge of zeros distribution which are induced by superposing them. And also the outline of a fundamental experiment and its result are explained briefly.