http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
홍영배(Y-B Hong),최성대(S-D Choi),정선환(S-H Cheong),김신호(S-H Kim) 한국기계가공학회 2006 한국기계가공학회 춘추계학술대회 논문집 Vol.2006 No.-
Quartz glass are used in semiconductor industries as the reaction furnace, wafer carrier and accessaries. During the process the surface of quartz glass received compression by direct contact with other quartz glass and metal as the form of weight pressure and vacuum pressure with thermal and mechanical vibration caused by process. Even as the other ceramic materials quartz glass have high compressive strength but often there happened crack and breakage of quartz glass resulted in a great damage in the process. In this paper investigation will be carried out on fracture behavior of quartz glass under compression to give guideline to prevent unintended fracture of quartz glass.
김신호(S-H Kim),정선환(S-H Cheong),최성대(S-D Choi),홍영배(Y-B Hong) 한국기계가공학회 2006 한국기계가공학회 춘추계학술대회 논문집 Vol.2006 No.-
This study involves the development of a flow control system to be used to supply photo-resist in the semi-conductor manufacturing process, this system features the measurement of high viscosity and micro flow. Flowmeter which measures high viscosity together with micro flow had not been fully developed until now. Thus this paper aims to achieve this objective likewise, optimum condition in the present PR-process will also be determined.