http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
광학적 측정을 이용한 정밀 스테이지 위치오차의 실시간 측정 방법에 관한 연구
조웅,현광익,김종형 한국공작기계학회 2008 한국공작기계학회 춘계학술대회논문집 Vol.2008 No.-
This paper suggests method to measure that error of the precision stage is used precision process and measurement equipment by using camera optics. Though laser interferometer measures position error of stage when precision stage is manufactured by us or it is used to measure stage for the nonce as a general rule, optics tooling position measurement method to suggest is possible to apply in real-time and trace an error range continually. Therefore it is able to improve capabilities of equipment by compensating an error range when operates precision process and measurement equipment in real-time.
광학적 측정을 이용한 정밀 스테이지 위치오차의 실시간 측정 방법에 관한 연구
조웅(Woong Cho),현광익(Kwang-Ik Hyun),김종형(Jong-Hyeong Kim) 한국생산제조학회 2008 한국생산제조시스템학회 학술발표대회 논문집 Vol.2008 No.5
This paper suggests method to measure that error of the precision stage is used precision process and measurement equipment by using camera optics. Though laser interferometer measures position error of stage when precision stage is manufactured by us or it is used to measure stage for the nonce as a general rule, optics tooling position measurement method to suggest is possible to apply in real-time and trace an error range continually. Therefore it is able to improve capabilities of equipment by compensating an error range when operates precision process and measurement equipment in real-time.