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초정밀장비 미진동제어를 위한 기계식 가변감쇠시스템의 진동제어성능 연구
심다솔(DaSol Shim),전종균(ChongKeun Chun),박용재(YongJai Park),박상곤(SangGon Park),한현희(HyenHee Han) 한국소음진동공학회 2017 한국소음진동공학회 논문집 Vol.27 No.4
The precision equipment for precision processing, manufacturing, and inspection process are usually managed in a strictly vibration-controlled environment that uses vibration isolators. To complement the weaknesses of these isolators, we designed and tested two types of mechanical adjustable dampers with helical gear: a box-like adjustable damper with a comb-type orifice and a round damper with a wing-type orifice. Additionally, we designed two versions for the latter: a standard version and an enhanced version to improve the variable performance. We then compared the performance of these two versions during their modal tests. Not surprisingly, the test showed that the enhanced version was superior to the standard version in variable damping. For this reason, we expect this damper to be particularly useful to semiconductor manufacturing facilities where the precision equipment are located.