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최수창(Soo Chang Choi),김진근(Jin Geun Kim),김용우(Yong Woo Kim),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2009 한국생산제조시스템학회 학술발표대회 논문집 Vol.2009 No.5
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a mechanical magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with the smallest measurable resolution was found to be at 0.25㎚.
마이크로팩토리 Vision/Inspection 시스템 요소기술 개발
최수창(Soo Chang Choi),이채문(Chae Moon Lee),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
In this paper, we demonstrate the development of nano positioning system for micro-factory vision/inspection system. Many conventional methods, such as laser-interferometer, capacitive displacement sensor, etc. have been applied for measuring nanoscale displacement of stage. But they had many problems, such as expensive and sophisticated system requirement, external electrical noise etc. In this study, we designed self displacement sensing nano stage using mechanism of AFM(atomic force microscope) measurement. Our method measures the displacement of stage using PSPD(position sensitive photo detector), laser source and hinge-connected rotation mirror plate. A beam from laser diode is focused onto the middle of the rotation mirror and plate the position variation of the reflected beam is monitored by PSPD. When the stage moves, the mirror rotates and the reflected beam moves on the PSPD. Finally the PSPD measures the amplified displacement compared to the actual moment of stage via optical lever mechanism, which provides us the possibility of more precise control of nano scale stage.
마이크로 팩토리 검사시스템용 자기측정 나노 스테이지개발
최수창(Soo Chang Choi),김용우(Yong Woo Kim),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
This paper describes the development of a nano-positioning system for Micro Factory Inspection System. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new self-displacement sensing (SDS) nano-stage was developed using mechanical magnification of its displacement signal. The SDS nano-stage measured the displacement of its movement using a position-sensitive photodiode (PSPD), a laser source, and a hinge-connected rotating mirror plate. A beam from a laser diode was focused onto the middle of the plate with the rotating mirror. The position variation of the reflected beam from the mirror rotation was then monitored by the PSPD. Finally, the PSPD measured the amplified displacement as opposed to the actual movement of the stage via an optical lever mechanism, providing the ability to more precisely control the nanoscale stage. The displacement amplification process was modeled by structural analysis. The simulation results of the amplification ratio showed that the distance variation between the PSPD and the mirror plate as well as the length L of the mirror plate could be used as the basic design parameters for a SDS nano-stage. Based on these results, a SDS nano-stage was fabricated using principle of displacement amplification.
최수창 ( Soo Chang Choi ),박정우 ( Jeong Woo Park ) 조선대학교 공학기술연구원 2013 공학기술논문지 Vol.6 No.4
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a combined magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with an magnification ratio of approximately 10,000, and the smallest measurable resolution was found to be at 0.7nm.
마이크로 팩토리 검사시스템용 자기측정 나노 스테이지개발
최수창(Soo Chang Choi),김용우(Yong Woo Kim),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
This paper describes the development of a nano-positioning system for Micro Factory Inspection System. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new self-displacement sensing (SDS) nano-stage was developed using mechanical magnification of its displacement signal. The SDS nano-stage measured the displacement of its movement using a position-sensitive photodiode (PSPD), a laser source, and a hinge-connected rotating mirror plate. A beam from a laser diode was focused onto the middle of the plate with the rotating mirror. The position variation of the reflected beam from the mirror rotation was then monitored by the PSPD. Finally, the PSPD measured the amplified displacement as opposed to the actual movement of the stage via an optical lever mechanism, providing the ability to more precisely control the nanoscale stage. The displacement amplification process was modeled by structural analysis. The simulation results of the amplification ratio showed that the distance variation between the PSPD and the mirror plate as well as the length L of the mirror plate could be used as the basic design parameters for a SDS nano-stage. Based on these results, a SDS nano-stage was fabricated using principle of displacement amplification.
마이크로팩토리 Vision/Inspection 시스템 요소기술 개발
최수창(Soo Chang Choi),이채문(Chae Moon Lee),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
In this paper, we demonstrate the development of nano positioning system for micro-factory vision/inspection system. Many conventional methods, such as laser-interferometer, capacitive displacement sensor, etc. have been applied for measuring nanoscale displacement of stage. But they had many problems, such as expensive and sophisticated system requirement, external electrical noise etc. In this study, we designed self displacement sensing nano stage using mechanism of AFM(atomic force microscope) measurement. Our method measures the displacement of stage using PSPD(position sensitive photo detector), laser source and hinge-connected rotation mirror plate. A beam from laser diode is focused onto the middle of the rotation mirror and plate the position variation of the reflected beam is monitored by PSPD. When the stage moves, the mirror rotates and the reflected beam moves on the PSPD. Finally the PSPD measures the amplified displacement compared to the actual moment of stage via optical lever mechanism, which provides us the possibility of more precise control of nano scale stage.
최수창(Soo Chang Choi),김용우(Yong Woo Kim),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
This paper describes the development of a nano-positioning system for high precision machining and measuring System. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new nano stage with displacement amplifying type displacement measuring instrument was developed using mechanical magnification of its displacement signal. The nano stage with displacement amplifying type displacement measuring instrument measured the displacement of its movement using a lever mechanism and capacitive transducers. When stage moves, the lever mechanism magnifies stage's displacement. Finally, the capacitive transducers measured the magnified displacement as opposed to the actual movement of the stage via an mechanical lever mechanism, providing the ability to more precisely control the nanoscale stage.
최수창(Soo Chang Choi),김용우(Yong Woo Kim),박정우(Jeong Woo Park),이득우(Deug Woo Lee) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.10
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a combined magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with an magnification ratio of approximately 10,000, and the smallest measurable resolution was found to be at 0.7㎚.
최수창(Soo-chang Choi),김용우(Yong-woo Kim),박정우(Jung-Woo Park),이득우(Deug-woo Lee) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed PSM Nanotage for AFM.
고경도 재료의 가공을 위한 초고속화 소형 에어스핀들 개발
최수창(Soo-Chang Choi),김용우(Yong-Woo Kim),이승준(Seung-jun Lee),이득우(Deug-Woo Lee) 한국기계가공학회 2009 한국기계가공학회 춘추계학술대회 논문집 Vol.2009 No.6월
It is necessary to secure the technology of design and manufacturing of high speed precision spindle for improving the quality of dental parts and attaining the technical level of advanced industrial countries. The aim in this paper is designing and manufacturing of high speed rotor and bearing system which runs over 300,00rpm. Finally, after evaluating the driving system, the ultra high speed rotor-bearing system runs over 300,000rpm is designed and manufactured.