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정형균(Hyoung-Kyoon Jung),황영석(Young-Seok Hwang),성운탁(Woon-Tahk Sung),장현기(Hyun-Kee Chang),이장규(Jang-Gyu Lee),김용권(Yong-Kweon Kim) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
In this paper, a non-vacuum packaged single crystalline silicon MEMS gyroscope is designed, fabricated and tested. To reduce air damping of the gyroscope structure for non-vacuum packaging, air damping model is used and damping is minimized by analysis. The inner and outer spring length is optimized by ANSYS simulation for rigid body motion. The gyroscope is fabricated by SiOG(Silicon On Glass) process. The performance of the gyroscope is measured to evaluate the characteristic of the gyroscope. The sensitivity, non-linearity, noise density and the bias stability are measured to 9.7693 ㎷/deg/s, 04265%, 2.3 mdeg/s/rtHz and 16.1014 deg/s, respectively.
A study on frequency response of two-mass system for gyroscope applications
황영석(Young Suk Hwang),정형균(Hyoung Kyoon Jung),송은석(Eun Seok Song),백창욱(Chang Wook Baek),김용권(Yong Kweon Kim) 대한전기학회 2007 대한전기학회 학술대회 논문집 Vol.2007 No.11
This paper describes frequency response of two-mass system for gyroscope applications. The two-mass system of the proposed device is adapted to the sensing part of the gyroscope in this research. Two-mass system has two resonant peaks and wide flat region between two resonant peaks. The resonant frequency of driving part is in this flat region. Therefore, frequency tuning is not necessary for mode matching. In the proposed device, resonant frequency is designed as 7183 ㎐ in driving part. Mass ratio of two masses in sensing part is 0.1 and device size is 6 ㎜ × 6 ㎜. The device is fabricated by SiOG process. The fabricated spring width is increased from 4 ㎛ to 4.5~4.7 ㎛, and the measured resonant frequency is 8392 ㎐ in driving mode. We operated the sensing part using parallel plate of proof mass to verify the sensing part. It is confirmed the device has a wide flat region in frequency response curve and the resonant frequency of the driving part is in the wide flat region of sensing mode.