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유연성을 고려한 4축 나노임프린팅 스테이지의 동적 해석
박성빈(Sung Bin Park),정재일(Jae I. Jeong),임홍재(Hong Jae Yim) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.11
A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.
이정석(Jung Suk Lee),이성훈(Sung Hoon Lee),정재일(Jay I. Jeong),임홍재(Hong Jae Yim) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
We analyze the stiffness of the precision stage for the nano-imprinting lithography equipment according to the number of the actuator axis. The precision stage should have enough stiffness to keep commanded position when the external force is induced on the stage, since the UV-nanoimprint process may induce the unbalanced force on the stage in X-Y direction. The experiments are conducted to obtain the stiffness of each axis for the 3-axis precision stage. The simulation is also executed to analyze the deformation of each axis when the external force is induced on the stage system. Based on the experiments and the simulation results on the 3-axis stage, we proposed new design criterion for the 4-axis stage that adopts the additional actuator on the fourth axis. We predict and compare the static deformation of the 4-axis stage when the same external forces as the case of 3-axis stage are induced on the 4-axis stage.
지지방식의 차이에 따른 나노 임프린팅 스테이지의 진동 특성 비교
이성훈(Sung Hoon Lee),박성빈(Sung Bin Park),이강욱(Kang Wook Lee),정재일(Jay I. Jeong),임홍재(Hong Jae Yim) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.11
In this study, vibrational characteristics of two nano-imprinting stages is analyzed and compared with respect to the methodology to support the upper-plate of the stage. The first type of the stage has three supporters at each corners of the stage and one thrust bearing at the center of the stage. The other type of the stage has four supporter in each corner of the stage without a thrust bearing. The FEM software with flexible modeling is used for the normal mode analysis. The result depicts the difference of vibrational characteristics caused by the difference of support methods. The design criteria for the precision nano-imprinting stage is also discussed.
나노 임프린팅 스테이지의 정렬제어 시 발생하는 진동해석
이용훈(Yong Hoon Lee),이정석(Jung Suk Lee),정재일(Jay I. Jeong),임시형(Si Hyung Lim),임홍재(Hong Jae Yim) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
XYθ stage for large area UV nano-imprinting lithography is modeled. Based on vibration tests by using a laser vibrometer, the equivalent multibody modeling for stage is established. To analyze vertical vibration which is caused during alignment control, some of the parts are converted into flexible bodies and then alignment control for the translation and angle offset cancellation is performed. The vertical vibration during the control action is analyzed with respect to supporter types of the stage and is compared to each other. The performed analysis can provide useful information for development of a high precision nano-imprinting stage.
김규학(Kyu Hak Kim),이승윤(Seung Yoon Lee),임홍재(Hong Jae Yim),정재일(Jay I. Jeong) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
Measuring thickness of resin using a machine vision system and image processing is presented in this research. A machine vsion System is one of the essential parts in order to inspect nano/micro patterns transferred by nanoimprint. Thickness of cured resin is determined from the relative distance between substrate and mold. For the measuring thickness, A machine vision system and image processing are used. A machine vision system which takes a focus on substrate and patten find out relative distance. Also it was possible for measured data to make more precise by image processing.