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이충구(李忠求) 교수(敎授) 정년퇴임기념특집(停年退任紀念特輯) : ITO 나노유체를 이용한 히트파이프 핫척의 열전달 특성
전일우 ( Il Woo Chun ),임택규 ( Taek Kyu Lim ),이석호 ( Seok Ho Rhi ),이충구 ( Chung Gu Lee ) 충북대학교 산업과학기술연구소 2010 산업과학기술연구 논문집 Vol.24 No.2
In this study, the circular heat pipe hot chuck plate was designed and manufactured with stainless steel (300mm in width, 15mm in depth). Distilled water andITO( In2SnO5) In2SnO5)-nanofluids with various particle concentrations were used as the working fluid of heat pipe hot chuck. The temperature uniformity on a heat pipe hot chuck (HPHC) has been investigated. The temperature uniformity on a HPHC during semiconductor wafer processing has been an important factor to critical dimension (300 mm). The temperature uniformity on the top surface in the present system was sustained in the range of ±1.5% in operation state. The experimental results with 0.01%-ITO nanofluid (40% charged) showed the best heat transfer performance and temperature uniformity.
ITO 나노유체를 이용한 히트파이프 핫척의 열전달 특성
전일우 ( Il Woo Chun ),임택규 ( Taek Kyu Lim ),이석호 ( Seok Ho Rhi ),이충구 ( Chung Gu Lee ) 충북대학교 산업과학기술연구소 2009 산업과학기술연구 논문집 Vol.23 No.2
In this study, the circular heat pipe hot chuck plate was designed and manufactured with stainless steel (300mm in width, 15mm in depth). Distilled water and ITO(In2SnO5)-nanofluids with various particle concentrations were used as the working fluid of heat pipe hot chuck. The temperature uniformity on a heat pipe hot chuck (HPHC) has been investigated. The temperature uniformity on a HPHC during semiconductor wafer processing has been an important factor to critical dimension (300 mm). The temperature uniformity on the top surface in the present system was sustained in the range of ±1.5% in operation state. The experimental results with 0.01%-ITO nanofluid (40% charged) showed the best heat transfer performance and temperature uniformity.