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정형균(Hyoung-Kyoon Jung),황영석(Young-Seok Hwang),성운탁(Woon-Tahk Sung),장현기(Hyun-Kee Chang),이장규(Jang-Gyu Lee),김용권(Yong-Kweon Kim) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
In this paper, a non-vacuum packaged single crystalline silicon MEMS gyroscope is designed, fabricated and tested. To reduce air damping of the gyroscope structure for non-vacuum packaging, air damping model is used and damping is minimized by analysis. The inner and outer spring length is optimized by ANSYS simulation for rigid body motion. The gyroscope is fabricated by SiOG(Silicon On Glass) process. The performance of the gyroscope is measured to evaluate the characteristic of the gyroscope. The sensitivity, non-linearity, noise density and the bias stability are measured to 9.7693 ㎷/deg/s, 04265%, 2.3 mdeg/s/rtHz and 16.1014 deg/s, respectively.