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분광측색계, 색차계의 색 수치 값을 이용한 타이타늄 산화막의 두께 정량화
이다영(Dayoung Lee),한아영(Ayoung Han),하동흔(Dongheun Ha),유현석(Hyeonseok Yoo),김훈식(Hunsik Kim),정나겸(Nagyeom Jung),장관섭(Kwanseop Jang),최진섭(Jinsub Choi) 한국표면공학회 2018 한국표면공학회지 Vol.51 No.3
The anodic TiO₂ layers which are prepared in various anodization conditions exhibit their specific color depending on the thickness of TiO₂. In this study, the relationship between the color of TiO₂ layer, which is grown by PEO (Plasma electrolytic oxidation), and the thickness of the TiO₂ layer is investigated. To evaluate the color change of the TiO₂ layer, the value of color (dE<SUP>*</SUP>ab) is measured and calculated by spectrophotometer and chromameter. As a result, it is found that dE<SUP>*</SUP>ab values and thickness of TiO₂ layers form a linear relationship with meaningful formular. This formula can be helpful to quantify the thickness of the TiO₂ layer by the numerical dE<SUP>*</SUP>ab values. In this process, the spectrophotometer shows more precise results than the chromameter dose. If fluoride ions (F-) are included in the electrolyte, it will affect the dE<SUP>*</SUP>ab values of the TiO₂. layer. This is against the propensity, which is analyzed by XRD (X-ray diffraction) and XPS (X-ray photoelectron spectroscopy). It is important that the formular suggested in this study provides other metals which can be also anodized with the possibility of quantifying the thickness of the TiO₂ layer by the dE<SUP>*</SUP>ab values.