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UV 임프린트를 이용한 이미지 센서용 마이크로 렌즈 어레이 성형 공정 개발
임지석 ( Ji Seok Lim ),김석민 ( Seok Min Kim ),정기봉 ( Gi Bong Jeong ),김홍민 ( Hong Min Kim ),강신일 ( Shin Il Kang ) 정보저장시스템학회 2005 추계학술대회논문집 Vol.2005 No.-
High-density image sensors have microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate micro lens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using UV transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed.After UV imprinting process, replication quality and align accuracy was analysed.
고세장비 마이크로 음각 형상을 갖는 대면적 스탬프의 제작
이병수(Byung Soo Lee),한정원(Jeongwon Han),한정진(Jungjin Han),임지석(Ji Seok Lim),유영은(Yeong-Eun Yoo),제태진(Tae-Jin Je),강신일(Shinill Kang) 한국소성가공학회 2009 한국소성가공학회 학술대회 논문집 Vol.2009 No.5
This paper describes a novel method for fabricating large area metallic stamp with high aspect ratio micro intaglio features. Micro machined brass master with pillar and larger width groove patterns were electroformed to form inverse structures on the large area metallic stamp. This enabled large area metallic stamp with fine micro high aspect ratio micro intaglio features which were small width groove patterns and quadrilateral hole patterns that cannot be fabricated by direct micro machining process. Fabricated large area metallic stamp with high aspect ratio micro intaglio features was measured and analyzed.