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2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발
석세영 ( Se Yeong Seok ),임근배 ( Geun Bae Lim ) 한국센서학회 2015 센서학회지 Vol.24 No.4
This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.
허준성 ( Joon Seong Heo ),임근배 ( Geun Bae Lim ) 한국센서학회 2015 센서학회지 Vol.24 No.1
Electrospinning method has easy preparation of nanofibers with a simple and versatile technique. Electrospun nanofiber is widely used by the simple approach and have great potentials in the numerous applicaitons of medicine, photonics, catalysts, sensors, etc. including advantage of their specific characteristics such as large surface to volume ratio. This paper focused on the fabrication of cobalt electrospun nanofibrer for applications such as electronic, optical and mechanical devices by metal based material. We fabricated cobalt nanofibers on aluminum foil by an electrospinning method. The electrospinning process was performed at a high voltage, 8 kV. The distance between the needle tip and the solution surface in the bath was 5 cm. The PVB - cobalt based nitrate solution was filled in a 10 mL syringe connected to a 22 gauge needle. We confirmed electrospun cobalt nanofiber after annealing process by SIMS (Secondary Ion Mass Spectrometry) analysis. The concept design, fabrication and results of mapping measurements are reported.
유연한 CNT Nanosheet 기판을 이용한 생체연료전지 Roll 제작
성중우 ( Jung Woo Sung ),임근배 ( Geun Bae Lim ) 한국센서학회 2014 센서학회지 Vol.23 No.6
The most promising application of the biofuel cells is implantable devices, so the biofuel cells should have an appropriate shape for the vascular vessel. We demonstrated the biofuel cell roll for using in tubes. MWNTs were aggregated by vacuum filtration on a nitrocellulose membrane filter, which was biocompatible and flexible. The MWNT aggregated nitrocellulose membrane used the electrodes of the biofuel cells because it was conductive as well as nanostuructured. Then, the membrane was rolled into the roll shape. The maximum power density of the biofuel cell roll was 7.9 μW/cm2 at 153mV and 50 mM glucose. Also, the power density is expected to increase in its practical application if there is flow in the tube, which makes the transportation of fuel easy. The biofuel cell roll contacts with the wall of the tube, so flow in the tube does not disturb. Also, the biofuel cell roll has multi-layers offering more electroactive area.
김인태 ( In Tae Kim ),안태창 ( Tae Chang An ),임근배 ( Geun Bae Lim ) 한국센서학회 2013 센서학회지 Vol.22 No.5
We developed a one-step method for fabrication of addressable suspended SWNT films and demonstrate excellent detection performance of paraoxon based on OPH-immobilized SWNT films for environmental monitoring. For dispersed SWNT suspension, COOH-SWNT was prepared by the oxidation of carbon nanotubes using acid treatment and sonication. Suspended SWNT-film was fabricated between cantilever electrodes by dielectrophoretic force and surface tension of the water meniscus. After that, OPH were immobilized on suspended SWNT-films by nonspecific binding for enzymatic hydrolysis of paraoxon. The electrical properties of the SWNT films were measured in real time at room temperature. Structurally suspended SWNT films from substrate surface made possible rapid and highly sensitive detection of target molecules with increased convectional and diffusional fluxes of the molecules and with a large binding surface area. SWNT film FET resulted in a real-time, label-free, and electrical detection of paraoxon to the concentration of ca. 10 μm with a step-wise rapid response time of several seconds.
전기방사를 이용한 TiO2/PVP/LiCl 나노섬유 습도 센서의 제작과 평가
유효봉 ( Hyo Bong Ryu ),김범주 ( Bum Joo Kim ),권혁진 ( Hyuk Jin Kwon ),허준성 ( Joon Seong Heo ),임근배 ( Geun Bae Lim ) 한국센서학회 2014 센서학회지 Vol.23 No.1
Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) TiO2/ PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.
부양형 탄소나노튜브 나노시트를 이용한 pH센서의 제작과 보정
유효봉 ( Hyo Bong Ryu ),최우석 ( Woo Seok Choi ),안태창 ( Tae Chang An ),허준성 ( Joon Seong Heo ),임근배 ( Geun Bae Lim ) 한국센서학회 2013 센서학회지 Vol.22 No.3
In this research, the pH sensor was developed using CNT nanosheet with Nafion coating for the advanced medical sensor such as a blood gas analyzer. The CNT nanosheet was formed by dielectrophoresis and water-meniscus between cantilever-type electrodes. Then, the process of the heat annealing and the Nafion coating was conducted for reducing contact resistance and giving proton selectivity respectively. We measured the response of the pH sensor as the electrolyte-gated CNT-nanosheet field effect transistor. The sensor showed a linear current ratio in a similar range of the normal blood pH. The calibration method was also introduced for decreasing the response variation of between sensors. Coefficient of variance of the pH sensor was decreased by applying the calibration method. A linear relation between the calibrated response of the sensors and pH variance was also obtained. Finally, the pH sensor with a high resolution was fabricated and we verify the feasibility of the sensor by applying the calibration method.
사진식각공정과 물방울 형틀을 이용한 PDMS 렌즈 제작
김진영 ( Jin Young Kim ),성중우 ( Jung Woo Sung ),조성진 ( Seong J Cho ),김철홍 ( Chul Hong Kim ),임근배 ( Geun Bae Lim ) 한국센서학회 2013 센서학회지 Vol.22 No.5
We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.
바이오센서 적용을 위한 미생물이 고정된 부양형 탄소나노튜브 필름 제작과 유기인 화합물 검출
김인태 ( In Tae Kim ),안태창 ( Tae Chang An ),김창섭 ( Chang Sup Kim ),차형준 ( Hyung Joon Cha ),김진호 ( Jin Ho Kim ),임수택 ( Soo Taek Lim ),임근배 ( Geun Bae Lim ) 한국센서학회 2014 센서학회지 Vol.23 No.1
Microbes have been used extensively in various fields of researches and industries but has not been used widely for microfluidic biosensor applications because it is difficult to immobilize properly to a small space. Therefore, we developed a microbial immobilization method for microfluidic devices using single-walled nanotubes and dielectrophoretic force. Single-walled nanotubes and Escherichia coli were aligned between two cantilever electrodes by a positive dielectrophoretic force resulting in a film of single-walled nanotubes with attached Escherichia coli. The optimal condition of film formation without a cell lysis was investigated. Diameter of single-walled nanotubes and electric field (intensity and duration of application) had an effect on the cell viability. On the other hand, the cell concentration of the suspension did not affect the cell viability. Paraoxon was detected using single-walled nanotubes film with attached Escherichia coli that expressed organophosphorus hydrolase. This film which is suspended from the substrate showed faster response time than sensors that are not suspended from the substrate.