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Sol-Gel법에 의한 $TiO_2$ 박막의 제작과 전기적 특성에 관한 연구
유도현,강대하,이능현,김진수,이덕출 한국전기전자재료학회 1994 電氣電子材料學會誌 Vol.7 No.4
In this paper, $TiO_2$ thin films were fabricated by Sol-Gel method and their electrical conductivity and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis condition. The uniform surface of thin films was confirmed by SEM. The electrical conductivity of thin films decreased with increasing heat treatment temperature. The humidity sensing properties of thin films were good in high humidity and low frequency regions.