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대면적 나노 임프린트 리소그래피를 위한 정렬장치의 개발
이진영(Jinyoung Lee),박영걸(Younggul Park),박인수(Insoo Park),임홍재(Hongjae Yim),장시열(Siyoul Jang),이기성(Keesung Lee),신동훈(Donghoon Shin),임시형(Si-Hyung Lim),정재일(Jay I. Jeong) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
We developed an alignment system for large area nano-imprint lithography. The alignment device is composed of vision part, drive part and control part. The vision part consists of two fine cameras and two pre cameras. These four cameras are used for searching target marks and object marks. The drive part is made up of three servo motors and three motor drives. According to control command, three servo motors drive stage with 1㎛ axis accuracy. The control part consists of control PC and Fv-aligner, Based on vision image information, Fv-aligner calculates U,V,W Axis Calibration values. After that, relative position between mark of mold and mark of glass will be adjusted. Besides three parts, there are UV-lamp part and laser calibration part.
대면적 나노 임프린트 리소그래피를 위한 정렬장치의 개발
이진영(Jinyoung Lee),박영걸(Younggul Park),박인수(Insoo Park),임홍재(Hongjae Yim),장시열(Siyoul Jang),이기성(Keesung Lee),신동훈(Donghoon Shin),임시형(Si-Hyung Lim),정재일(Jay I. Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
We developed an alignment system for large area nano-imprint lithography. The alignment device is composed of vision part, drive part and control part. The vision part consists of two fine cameras and two pre cameras. These four cameras are used for searching target marks and object marks. The drive part is made up of three servo motors and three motor drives. According to control command, three servo motors drive stage with 1㎛ axis accuracy. The control part consists of control PC and Fv-aligner, Based on vision image information, Fv-aligner calculates U,V,W Axis Calibration values. After that, relative position between mark of mold and mark of glass will be adjusted. Besides three parts, there are UV-lamp part and laser calibration part.
대면적 임프린트 장비의 스테이지 정렬운동 과정에서 LCD Glass 변형에 대한 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alignment process, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alignment process is about 49㎚.
나노 임프린트 장비 환경제어를 위한 초정밀 온도 제어에 관한 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Il Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. also an air cooling process using unit take account of air current analysis in chamber is important. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and one air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR(Silicon Control Rectifier) control the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The control is heating and cooling at the same time by PID controller. So reducing temperature control error. The unit is consists of an air cycle method, so reduce the time and easy to contl. also Optimizing an air current contributive improves performance of nanoimprint
대면적 임프린트 장비의 스테이지 정렬운동 과정에서 LCD Glass 변형에 대한 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During alignment process to fix the LCD glass on a alignment stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alignment process, and the horizontal and vertical displacement which occurs in the LCD glass at the alignment process. Algor which is a FEM code for a framework simulation was applied. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alignment process is about 49㎚.
열전소자를 이용한 정밀 항온 유지 장치에 관한 실험 및 시뮬레이션 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and two air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR controls the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The temperature control unit is able to control the exit temperature about ±2℃ from the incoming fluid temperature, and the error range is ±0.1℃. However, the control time is approximately 30minute, which needs further study of active control
대면적 임프린트 장비를 위한 LCD Glass 변형 시뮬레이션 연구
송영중(Youngjoong Song),신동훈(Donghoon Shin),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jayil Jeong) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
The purpose of the study is to simulate the displacement of the LCD glass during process of a large size imprint. During this process, a small temperature variation makes thermal stress, which causes the horizontal variation of mold and glass. During alig㎚ent process to fix the LCD glass on a alig㎚ent stage, the vertical displacement is made by the absorption pressure and the shear stress. This study simulates the horizontal displacement of mold and glass due to temperature variation, the vertical displacement depending on the shape of absorption surface fixing the LCD glass in the alig㎚ent process, and the horizontal and vertical displacement which occurs in the LCD glass at the alig㎚ent process. Algor which is a FEM code for a framework simulation was applied. Temperature variation above ± 0.1℃ on mold and glass causes the horizontal displacement of 150㎚ due to thermal expansion. The vertical displacement due to the circular is ten times of the case of rectangular absorption nozzle. The displacement of the LCD glass in the alig㎚ent process is about 49㎚.
대면적 나노임프린트 리소그래피에 사용되는 기점마크를 이용한 정렬과정의 오차원인 분석
박인수(Insoo Park),박영걸(Yonggul Park),이민규(Minkyu Lee),신동훈(Donghoon Shin),이기성(Keesung Lee),장시열(Siyoul Jang),임홍재(Hongjae Yim),정재일(Jayil Jeong) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
Several error sources are analyzed when aligning flexible glasses into the target position used in nano-imprint lithography. When aligning a mold and a target glass, two fiducial marks on each are typically used with machine vision camera in order to eliminate relative positional error. However, the flexibility of the glass and mold can cause error in relative position between two fiducial marks. We investigate these error sources in this work: difference of refraction rates between mold, resin, and the target glass; angular inclination of glasses; shape distortion of the marks due to glass deformation from the gravity. Finally, the design values are suggested as a guidance for designing fiducial marks.