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반도체 클린룸용 직접분무식 에어와셔 시스템의 성능평가실험
여국현(Kuk-Hyun Yeo),유경훈(Kyung-Hoon Yoo),태경응(Kyung-Eung Tae) 대한설비공학회 2006 대한설비공학회 학술발표대회논문집 Vol.2006 No.6
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as NH₃, SO<SUB>x</SUB> and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.
반도체 클린룸용 직접분무식 에어와셔 열회수 및 가스제거 실험
여국현(Kuk-Hyun Yeo),유경훈(Kyung-Hoon Yoo),태경응(Kyung-Eung Tae) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.6
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as NH3, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.
반도체 클린룸용 에어와셔 시스템의 열회수, 집진 및 가스제거 특성
여국현(Kuk-Hyun Yeo),유경훈(Kyung-Hoon Yoo) 한국실내환경학회 2006 한국실내환경학회지 Vol.3 No.2
In recent models of semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as NH₃, SO<SUB>x</SUB> and organic gases introduced from outdoor air into clean room. Meanwhile, there is a large quantity of exhaust air produced from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate heat recovery, particle collection, and gas removal in a heat recovery type air washer system for semiconductor manufacturing clean rooms.
여국현(Kuk-Hyun Yeo),유경훈(Kyung-Hoon Yoo),차호진(Ho-Jin Cha),김용우(Yong-Woo Kim),최동규(Dong-Kyu Choi),이홍규(Henry Lee) 대한설비공학회 2006 대한설비공학회 학술발표대회논문집 Vol.2006 No.6
In recent European telecommunication base transceiver stations(BTS) a membrane laminated air filter is reported to replace a heat exchanger in order to cool internal digital units of BTS. The concept of using the air filter is for the direct ambient cooling(DAC) of BTSs without heat loss generally found in the heat exchanger type BTS. In the present study, a performance evaluation experiment was conducted to investigate the pressure drop characteristics with dust loading and the particle collection efficiency of the air filter for the DAC of BTS.
반도체 클린룸용 수증기 응축식 에어와셔 시스템의 성능평가
여국현(Kuk-Hyun Yeo),박상태(Sang-Tae Park),유경훈(Kyung-Hoon Yoo),손승우(Seung-Woo So) 대한설비공학회 2006 대한설비공학회 학술발표대회논문집 Vol.2006 No.6
In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),차호진(Ho-Jin Cha),김용우(Yong-Woo Kim),최동규(Dong-Kyu Choi),이홍규(Henry Lee) 한국실내환경학회 2006 한국실내환경학회지 Vol.3 No.2
In recent European telecommunication base transceiver stations(BTS), a membrane laminated air filter is reported to replace a heat exchanger in order to cool internal digital units of BTS. The concept of using the air filter is for the direct ambient cooling (DAC) of BTS without heat loss generally found in the heat exchanger type BTS. In the present study, a performance evaluation experiment was conducted to investigate the pressure drop characteristics with dust loading and the particle collection efficiency of the air filter for the DAC of BTS. Finally, the long term operation lifetime of the air filter for BTS was suggested with a given fan rotation speed.
반도체 클린룸용 에어와셔의 수증기 응축에 의한 화학오염물 제거성능 개선 실험
유경훈(Kyung-Hoon Yoo),여국현(Kuk-Hyun Yeo),박상태(Sang-Tae Park),손승우(Seung-Woo Son) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.6
In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.