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국부적 열원을 기반으로 합성한 백금 나노입자가 코팅된 산화아연 나노와이어와 화학센서의 응용
김동환(Donghwan Kim),임미애(Mi-Ae Lim),양대종(Dajong Yang),박종욱(Chong Ook Park),박인규(Inkyu Park) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
In this paper, we have developed a novel fabrication method of ZnO nanowires (NWs) based on localized hydrothermal synthesis and simple surface modification process with Pt nanoparticles (NPs) for gas sensing applications. The microheaters under interdigitated electrodes supply localized heating to initiate a direct growth of ZnO NWs between the electrodes selectively. The device can be used for the detection of hydrogen (H₂) at 100-5000ppm. Moreover, the surface of ZnO NWs can be selectively coated with Pt NPs by using the microheaters to further improve the H2 sensing performances. This study may provide a new opportunity for a simple modification of nanostructures and applying it to multiplexed chemical sensor.