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곡면 유리 표면 위에서 박막 측온저항체 온도센서 어레이 제작 및 성능 평가
안철희(Chul Hee Ahn),김형훈(Hyoung Hoon Kim),박상후(Sang Hu Park),손창민(Changmin Son),고정상(Jeung Sang Go) 한국가시화정보학회 2011 한국가시화정보학회지 Vol.9 No.2
This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to 300 ℃ without disturhing a fluid flow. In order to overcome the difficulty in the three dimensional photography or sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.