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일유체 노즐을 이용한 실내 수분무가습 방식 클린룸의 에너지소비량에 관한 실험적 연구
송원일(Won-Il Song),박수빈(Su-Bin Park),김기철(Ki-Cheol Kim),유경훈(Kyung-Hoon Yoo),태경응(Kyung-Eung Tae),김용식(Yong-Sik Kim),양지석(Ji-Seok Yang),송덕용(Deog-Yong Song),권오명(Oh-Myoung Kwon),이건형(Kun-Hyung Lee) 대한설비공학회 2018 설비공학 논문집 Vol.30 No.11
For a recent large-scale semiconductor manufacturing plant, the air conditioning energy consumption required to maintain a cleanroom environment accounts for 40~50% of the total energy consumption in the plant. Therefore, the assessment of the air conditioning energy consumption in the cleanroom is critical for reducing energy cost in the plant. Particularly, the energy consumption required to humidify incoming outdoor air in the winter season is generally known to be high. In order to displace the huge energy consumption of steam generators like boilers in a conventional steam humidification type cleanroom, a water spray humidification technique by use of a water spray nozzles can be introduced into the air circulation path inside the cleanroom instead of the steam generators inside the outdoor air conditioning system. In the present study, a twin cleanroom experiment with each outdoor air flow of 2,300 ㎥/h was conducted to obtain and compare real time electric power consumption structures of a steam humidification type cleanroom and an indoor water spray humidification type cleanroom with one-fluid nozzles. In addition, a numerical calculation was carried out to assess the annual power consumptions of the two types of cleanrooms. It was concluded from the present work that the indoor water spray humidification type cleanroom was more energy-efficient and reduced the annual electric power consumption of the steam humidification type cleanroom by about 27%.
일유체 노즐을 이용한 실내 수분무 가습 방식 클린룸의 에너지 절감에 관한 실험적 연구
박수빈(Su-Bin Park),송원일(Won-Il Song),유경훈(Kyung-Hoon Yoo),태경응(Kyung-Eung Tae),김용식(Yong-Sik Kim),양지석(Ji-Seok Yang),송덕용(Deog-Yong Song),권오명(Oh-Myoung Kwon),황정호(Jungho Hwang) 대한설비공학회 2018 대한설비공학회 학술발표대회논문집 Vol.2018 No.6
In recent large-scale semiconductor manufacturing cleanrooms, the air conditioning energy consumption required to maintain cleanroom environment represents 40~50 % of the total power consumption in the factory. Therefore, the assessment on energy consumption in the air conditioning system of the cleanroom factory is essential for reducing the air conditioning load for the cleanroom. In particular, the energy consumption required to humidify outdoor air in the winter season is generally known to be enormous. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type cleanroom, a water spray humidification method with water spray nozzles is often introduced into cleanroom indoors instead of the steam generator in the outdoor air conditioning system. In the present study, a twin cleanroom experiment with an outdoor air flow of 2,300 m³/h was conducted to compare at the same time the electric power consumption structure in a steam humidification type cleanroom and an indoor water spray humidification type cleanroom with one fluid nozzles. Besides, a numerical calculation was carried out to evaluate the annual power consumption of the two types of cleanrooms. It can be concluded from the present study that the indoor water spray humidification type cleanroom is more energy-efficient than the steam humidification type cleanroom. Furthermore it was shown from the numerical results that the indoor water spray humidification type cleanroom reduced 27 % of the annual electric power consumption of the steam humidification type cleanroom.