http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
김시준,정원녕,이영석,설유빈,조철희,성인호,최민수,유신재 한국진공학회 2023 Applied Science and Convergence Technology Vol.32 No.5
Plasma diagnostics, especially electron density measurements, have attracted much attention as it promotes an understanding of plasma and its applications. In this study, a parallel double-curling probe, which consists of two individual curling slot antennae and one microwave input/ output port, is demonstrated for multisite electron density measurements using three-dimensional electromagnetic wave simulations. We verify its step-by-step operation, including the demonstration of a single curling probe, double-curling probe, and parallel double-curling probe. For the single curling probe, we introduce a curling probe operation, while for the double-curling probe, we verify the operation of two curling probes with a single microwave input/output port. With respect to the parallel double-curling probe, simulation results indicate that it can measure the multi-site electron density above its individual curling-slot antenna. This study is applicable for the parallelization and multiplication of curling probes in the development of plasma uniformity sensors.
Computational Analysis on Self-Resonance Frequency of Solenoid and Planar Inductor
최민수,김시준,이영석,조철희,성인호,정원녕,유예빈,최병엽,설유빈,유신재 한국진공학회 2023 Applied Science and Convergence Technology Vol.32 No.2
Despite the importance of self-resonance frequency (SRF) in the operation of inductors, which is only effective below the SRF, a comprehensive analysis of the SRF in different inductor structures has yet to be conducted. This work employs a three-dimensional electromagnetic wave simulation to analyze SRF in the both solenoid and planar inductor structures with various inductor structure parameters such as the number of turns, radius, and inter-coil distance. We summarize the behavior of the SRF with these parameters. This result is valuable for radio-frequency engineering applications.