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극미세 3차원 형상복제를 위한 금속몰드 제작에 관한 연구
배공명(Kong Myung Bae),고종수(Jong Soo Ko),박상후(Sang Hu Park),임태우(Tae Woo Lim),양동열(Dong-Yol Yang) Korean Society for Precision Engineering 2009 한국정밀공학회지 Vol.26 No.8
Fabrication of a three-dimensional (3D) metallic mold for multi-production of a microstructure was studied to settle the problem of long processing time in 3D microfabrication. To date, complicated 3D microstructures including 3D photonic crystals, 3D microlens array, 3D filter for microfludics, and something else were created successfully using the two-photon polymerization (TPP) which was considered as paving the way to fabricate a real 3D shape in nano/microscale. However, for those fabrications, much processing time and efforts were inevitably required. To solve this issue, a simple and effective way was proposed in this paper; 3D master patterns were prepared using TPP, and then counter-shaped Ni molds were fabricated by electroforming process. By using these molds, 3D microstructures can be reproduced with short-processing time and low-effort comparing to the conventional approach, TPP. We report some parameters to fabricate a metallic mold precisely.