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이재호(Jeaho Lee),박태동(Teadong Park),정준홍(Joonhong Jung),박기헌(Kiheon Park) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
A laser interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano resolution and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The laser interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. The output of the laser interferometer is assumed to be the sum of a real displacement and a Markov process noise. The purpose of this paper is to develop Kalman filter algorithms to reduce the laser interferometer measurement errors by exploiting the information of displacements in position-servo systems.