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전기 도금된 CoFeNi계 박막의 결정크기와 방향성이 자기특성에 미치는 영향
정원용(Won Young Jeung),김현경(Hyun Kyung Kim),박창빈(Chang Bean Park) 한국자기학회 2006 韓國磁氣學會誌 Vol.16 No.5
CoFeNi alloys are some of the most studied soft magnetic materials because of their superial properties over FeNi alloys as write head core materials in HDD and MEMS. We studied the effect of magnetic property according to size and orientation of crystal for electroplated Co-Fe-Ni alloys. In case of heat treated ternary alloy, it affect the change of crystal size and structure. In this study, it intends to improve the magnetic properties of CoFeNi thin film by heat treatment. Minimized coercivity and increased magnetization are due to heat treatment from 300 ℃ to 400 ℃. As a bcc phase formation, it grow to amount of magnetization.