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- 저자 : 민선기 ( Seon Ki Min ) (검색결과 3 건)
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초임계 이산화탄소를 이용한 미세전자기계시스템의 식각, 세정, 건조 연속 공정
민선기 ( Seon Ki Min ),한갑수 ( Gap Su Han ),유성식 ( Seong-sik You ) 한국화학공학회 2015 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.53 No.5
The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-CO2 (supercritical-CO2) consists of two steps. Firstly, MEMS-wafers are etched by organic solvent in a separate etching equipment from the high pressure dryer and then moved to the high pressure dryer to rinse and dry them using SC-CO2. We found that the previous two step process could be applied to etch and dry wafers for MEMS but could not confirm the reproducibility through several experiments. We thought the cause of that was the stiction of structures occurring due to vaporization of the etching solvent during moving MEMS wafer to high pressure dryer after etching it outside. In order to improve the structure stiction problem, we designed a continuous process for etching, rinsing and drying MEMS-wafers using SC-CO2 without moving them. And we also wanted to know relations of states of carbon dioxide (gas, liquid, supercritical fluid) to the structure stiction problem. In the case of using gas carbon dioxide (3 MPa, 25 oC) as an etching solvent, we could obtain well-treated MEMS-wafers without stiction and confirm the reproducibility of experimental results. The quantity of rinsing solvent used could be also reduced compared with the previous technology. In the case of using liquid carbon dioxide (3 MPa, 5 oC), we could not obtain well-treated MEMS-wafers without stic- tion due to the phase separation of between liquid carbon dioxide and etching co-solvent(acetone). In the case of using SC-CO2 (7.5 Mpa, 40 oC), we had as good results as those of the case using gas-CO2. Besides the processing time was shortened compared with that of the case of using gas-CO2.
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철 기반 촉매의 Fischer-Tropsch 합성에서 γ-Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> 혼합 지지체 조성의 영향
민선기 ( Seon Ki Min ),노성래 ( Seong-rae No ),유성식 ( Seong-sik You ) 한국화학공학회 2017 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.55 No.3
Fischer-Tropsch synthesis is the technology of converting a syngas (CO+H<sub>2</sub>) derived from such as coal, natural gas and biomass into a hydrocarbon using a catalyst. The catalyst used in the Fischer-Tropsch synthesis consists of active metal, promoter and support. The types of these components and composition affect the reaction activity and product selectivity. In this study, we manufactured an iron catalyst using γ-Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> mixed support (100/0 wt%, 75/25 wt%, 50/50 wt%, 25/75 wt%, 0/100 wt%) by an impregnation method to investigate how the composition of γ-Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> mixed support effects on the reaction activity and product selectivity. The physical properties of catalyst were analyzed by N<sub>2</sub> physical adsorption and X-Ray diffraction method. The Fischer-Tropsch synthesis was conducted at 300 ℃, 20bar in a fixed bed reactor for 60h. According to the results of the N<sub>2</sub> physical adsorption analysis, the BET surface area decreases as the composition of γ-Al<sub>2</sub>O<sub>3</sub> decreases, and the pore volume and pore average diameter increase as the composition of γ-Al<sub>2</sub>O<sub>3</sub> decreases except for the composition of γ-Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> of 50/50 wt%. By the results of the X-Ray diffraction analysis, the particle size of α-Fe<sub>2</sub>O<sub>3</sub> decreases as the composition of γ-Al<sub>2</sub>O<sub>3</sub> decreases. As a result of the Fischer-Tropsch synthesis, the CO conversion decreases as the composition of γ-Al<sub>2</sub>O<sub>3</sub> decreases, and the selectivity of C1-C4 decreases until the composition of γ-Al<sub>2</sub>O<sub>3</sub> was 25 wt%. In contrast, the selectivity of C5+ increases until the composition of γ-Al<sub>2</sub>O<sub>3</sub> is 25 wt%.
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한수호,김정욱,전순원,박승호,박형민,민선기,정명채,Han, Su Ho,Kim, Jeong Wook,Jeon, Soon Won,Park, Seung Ho,Park, Hyeong Min,Min, Seon Ki,Jung, Myung Chae 한국지하수토양환경학회 2021 지하수토양환경 Vol.26 No.6
This study examined the possibility of reutilization of soil reclaimed from contaminated sites after completing remediation. The current status of soil remediation methods in Korea was reviewed and physicochemical properties of soil before and after remediation processes were examined to access the recycling possibility of reclaimed soils based on Recycling Aggregate Quality Standard. The most commonly practiced soil remediation techniques are soil washing, land farming, and thermal desorption. These techniques tend to deteriorate various soil properties including electrical conductivity(EC), organic matter content(OM), available P<sub>2</sub>O<sub>5</sub>, and cation exchange capacity(CEC). Evaluation of the properties of soil retrieved after each remediation process indicated soil washing may yield the most suitable soil for use as a filling, covering, back-filling, road pavement, and blocking materials, In addition, the soils reclaimed from land farming and thermal desorption have potential utility as a filling, covering and road pavement materials.
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