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MEMS 및 센서 시스템 : 자외선 레이저를 이용한 고정밀 저항제 가공기술 개발
노상수 ( S. S. Noh ),김동현 ( D. H. Kim ),정귀상 ( G. S. Chung ),김형표 ( H. P. Kim ),김광호 ( K. H. Kim ) 한국센서학회 2002 센서학회지 Vol.11 No.6
In this paper, we used U.V.(wavelength, 355nm) laser for adjusting Pt thin films temperature sensor to 100Ω at 0℃. Internationally, A-class tolerance of temperature sensor is ±0.06Ω at 0℃. This is under value of 0.15℃, actually, so high-fine trimming technology is essential to this process. The width of trimmed lines was about 10㎛ and the best trimming of Pt thin films of 1~1.5㎛ was carried out with power : 35mW, rep. rate frequency : 200Hz and bite size : 1.5㎛ . And using photolithography process, 96 resistors were fabricated in 2″x 2″substrate as the proportion of 79~90Ωand 91~102Ω is 42.7% and 57.3%, respectively. As result of trimming resistors to the target value of 109.73Ω at 25℃, 82.3% of resistors had the tolerance within ±0.03Ω and the others(17.7%) were within ±0.06Ω of A-class tolerance.