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기판바이어스 전압이 나노복합구조 CrZrSiN 박막의 기계적 물성에 미치는 영향에 관한 연구
김규성 ( Kyu Sung Kim ),김회근 ( Hoe Kun Kim ),라정현 ( Joung Hyun La ),김광배 ( Kwang Bae Kim ),이상율 ( Sang Yul Lee ) 대한금속재료학회(구 대한금속학회) 2015 대한금속·재료학회지 Vol.53 No.8
Nanocomposite CrZrSiN thin films were deposited with various substrate bias voltages from 0 to -200 V using unbalanced magnetron sputtering. The crystalline structure, microhardness, microstructure, and adhesion properties of the CrZrSiN thin films were evaluated by X-ray diffraction, Fischer scope, field-emission scanning electron microscopy, and a scratch tester. The surface roughness and deposition rate decreased with an increase in the substrate bias voltage. The substrate bias voltage increased and the hardness increased to 36 GPa at -100 V, then decreased to 32 GPa as the substrate bias voltage further increased to -200V. The CrZrSiN thin films maintained their hardness up to 800℃ while the hardness of CrZrN film decreased rapidly over 500℃. The critical load (Lc3) increased from 8 N to 35 N up to a substrate bias voltage of -100 V, while the critical load decreased to 8 N with further increase of the substrate bias voltage. (Received February 07, 2015)
증착 기판 온도 제어에 따른 Zn-Mg 박막의 치밀도 및 내식성 향상에 관한 연구
송면규(Myeon-Kyu Song),라정현(Joung-Hyun La),김회근(Hoe-Kun Kim),이상율(Sang-Yul Lee) 한국표면공학회 2017 한국표면공학회지 Vol.50 No.4
In this study, the corrosion resistance of Zn-3wt.%Mg coating was enhanced by controlling the density of coating. During the deposition the substrate temperature was controlled via an intermittent deposition process, resulting in the improvement of coating density. The maximum substrate temperature during this intermittent deposition process could be controlled from 200 ℃ to 80 ℃, depending upon the number of coating layer. The density of Zn-3 wt.%Mg coating increased from 76.1 % to 95.8 % as the substrate temperature was controlled. The salt spray test results revealed that the corrosion resistance of Zn-Mg coated steel could increase 3 times by increasing the density in coatings, while adhesion strength of coating was not changed significantly during 0-T bending test.