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허용학(Yong-Hak Huh),김동일(Dong-Iel Kim),한준희(Jun-Hee Hahn),김광석(Gwang-Seok Kim),연순창(Soon-Chang Yeon),김용협(Yong-Hyub Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 ㎚ in stroke. TiN thin film 1㎛ thick was deposited on the Si wafer pre-deposited of Si₃N₄ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of 50㎛, 100㎛ and 500㎛ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation