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금 박막의 마이크로 인장 특성 측정 : 시험편 크기 영향
허용학(Yong-Hak Huh),김동일(Dong-Iel Kim),기창두(Chang-Doo Kee),연순창(Soon-Chang Yeon),김용협(Yong-Hyup Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.8
Tensile properties of gold thin film were evaluated using micro-tensile testing system. Gold thin films 0.5㎛ and 1.0㎛ thick were produced by sputtering and three kinds of the specimen 50㎛, 100㎛ and 200㎛ wide were prepared by micro-machining. From the tensile tests of the various specimens, dependency of thickness and width on the 0.2% yielding strength, tensile strength and elastic modulus was examined. It was shown that 0.2% yielding strength and tensile strength increased with increase of the width, while those decreased with the increase of the thickness. Elastic modulus was measured in the range of 51~59㎬. Furthermore, dependency of the test speed on the tensile properties was investigated. It was said that those obtained in the range of 25㎛/min and 75㎛/min were nearly identical.
금 박막에서 마이크로 인장 특성에 대한 입자 크기 영향
김동일(Dong-Iel Kim),허용학(Yong-Hak Huh),기창두(Chang-Doo Kee),연순창(Soon-Chang Yeon),김용협(Yong-Hyup Kim) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Micro-tensile tests for Au thin films with three different thicknesses were carried out to investigate the effect of the grain size on tensile properties. Au thin films with the respective thickness of 0.18, 0.5 and 1.0 ㎛ were produced by sputtering and micro-tensile specimens 2 ㎜ long and 200 μ wide were fabricated using micro-machining process. Tensile stress-strain curves, showing elasitc-plastic behavior, were obtained using the strain measurement system, i.e. micro-ESPI system, developed in this study. From these curves, 0.2% yielding strength, tensile strength and elastic modulus, were determined. It was found that these values were dependent on the grain size of the films. Furthermore, in this study, the effect of the width of the specimens was also investigated.
허용학(Yong-Hak Huh),김동일(Dong-Iel Kim),한준희(Jun-Hee Hahn),김광석(Gwang-Seok Kim),연순창(Soon-Chang Yeon),김용협(Yong-Hyub Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 ㎚ in stroke. TiN thin film 1㎛ thick was deposited on the Si wafer pre-deposited of Si₃N₄ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of 50㎛, 100㎛ and 500㎛ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation