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KrF Pulsed Laser Ablation 법으로 제조한 NdxFe90.98-xB9.02 박막의 자기특성
김상원(S. W. Kim),양충진(C. J. Yang) 한국자기학회 1997 韓國磁氣學會誌 Vol.7 No.6
NdFeB films have been grown onto Si (100) substrate by a KrF pulsed laser ablation of the targets of Nd_xFe_(90.98-x)B_(9.02) (x = 17.51~27.51) at the substrate temperature of 620~700℃ and the laser beam energy density of 2.75~5.99 J/㎠. The films exhibit no preferred orientation, however, good hard magentic properties were produced from as -deposited condition: 4 πMs ~_ 7 kG, 4 πMr ~_ 4 kG, and Hc = 300~1000 Oe. The depositon rate was not greatly influenced by changing the substrate temperature, but it increases linearly by increasing the beam energy density. The beam energy density of 3 J/㎠ gave the optimal condition to have the highest 4 πMr and Hc as well. The higher content of Nd induces a higher coercivity and 4 πMr at the same time without prominent change in 4 πMs.
Magnetic Properties of Heteroepitaxial Y₃Fe5O₁₂ Films Grown by a Pulsed Laser Ablation Technique
김상원(C. J. Yang),양충진(S. W. Kim) 한국자기학회 1995 韓國磁氣學會誌 Vol.5 No.2
Yttrium Iron Garnet(Y₃Fe_5O₁₂) films have been successfully grown on(111)GGG wafer by KrF excimer laser ablation of stoichiometric garnet target at the oxygen partial pressure, P(O₂), ranging 20 to 500 mTorr. During the deposition of the films the substrate temperature was maintained at 700 ℃ and the laser beam energy density at 7.75 J / ㎠. Microstructure, composition and magnetic properties of the films obtained were investigated as a function of oxygen pressure and thickness of the films. Epitaxial films with a dense and a smooth surface were reproducible at a low oxygen pressure. The films of 2.75 ㎛ in thickness deposited at 20 mTorr of P(O₂) showed 4πMs of 1500 Gauss and Hc of 3 Oe after annealing at 800℃ for 20 minutes. As-deposited films of 0.8 ㎛ in thickness exhibited the 4πMs of 1730 Gauss and Hc of 7 Oe. The magnetic properties of the films obtained were almost identical to those of a single crystal YIG.
Polycrystalline Y₃Fe5 O₁₂ Garnet Films Grown by a Pulsed Laser Ablation Technique
김상원(S. W. Kim),양충진(C. J. Yang) 한국자기학회 1994 韓國磁氣學會誌 Vol.4 No.3
Y₃Fe_5O₁₂ based garnet films (thin or thick) offer a great promise for the application of microwave communication components. We investigated the magnetic and crystallographic preperties of Y₃Fe_5O₁₂ thick films prepared by KrF eximer laser ablation of a stoichiometric garnet target. It was possible to obtain almost epitaxially oriented films on Al₂O₃ (1102) plane. Although the crystalline quality depends on substrate temperature and O₂, partial pressure used(Po₂), 4.1m thick films of 4πMs,=1300 Gauss and Hc =37.5 Oe were obtained at the substrate temperature of 700℃ with the Po₂ of 100 mTorr after annealing the as-deposited films at 700℃ for 2 hours. These films are expected to be used for magnetostatic spin wave filters at narrow bandwidth frequency.