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나노 실리카분말의 충진효과를 이용한 극미세 3차원 세라믹 구조물 정밀화
임태우(T.W. Lim),박상후(S.H. Park),양동열(D.Y. Yang),Tuan Anh Pham,김동표(D.P. Kim) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
A novel nanofabrication process has been developed using two-photon crosslinking (TPC) for the fabrication of threedimensional (3D) SiCN ceramic microstructures applicable to high functional 3D devices, which can be used in harsh working environments requiring a high temperature, a resistance to chemical corrosion, as well as tribological properties. After sequential processes: TPC and pyrolysis, 3D ceramic microstructures are obtained. However, large shrinkage due to low-ceramic yield during the pyrolysis is a serious problem to be solved in the precise fabrication of 3D ceramic microstructures. In this work, silica nanoparticles were employed as a filler to reduce the amount of shrinkage. In particular, the ceramic microstructures containing 40 wt% silica nanoparticles exhibited relatively isotropic shrinkage owing to its sliding free from the substrate during pyrolysis.