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권순근(Soon-Geun Kwon),임형준(Hynug-Jun Lim),김수현(Soo-Hyun Kim),곽윤근(Yoon Keun Kwak) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
In recent years, demands on microelectrode have been greatly enhanced because of its potential applications and mass production of microelectrodes is needed. An electrochemical fabrication is used as an method for the simple and cheap fabrication of multi microelectrodes. In this paper, one dimensional microelectrode array is used for fabricating of multi electrodes. A diffusion layer which is formed near the electrode surface has an effect on the shape error of multi microelectrodes. The optimal distance between electrodes to minimize shape errors of multi electrodes is investigated. Multi microelectrodes which has several tens of and hundreds of micrometer in diameter are fabricated at a time.
탄소 나노튜브 프로브 조립을 위한 탄소 나노튜브의 전기적 조작 방법
권순근(Soon-Geun Kwon),임동현(Dong-Hyun Lim),곽윤근(Yoon Keun Kwak),김수현(Soo-Hyun Kim) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
During the past several years, carbon nanotube probes(CNT probes) have been used for various applications such as scanning microscope probe, electron emitting device and sensor for chemical and biological applications. Even though their versatile applications, there is an limitation especially on the reproducible fabrication of CNT probes. In this paper, Dielectrophoresis, one of the electrical manipulations, is used to manipulate CNT and make an assembly of CNT between the electrodes. We used the technique of the simultaneous conductance measurement while using the dielectrophoresis to trap the CNTs between the electrodes. A CNT probe fabrication is performed through the mechanical breakdown of the CNT-electrodes assembly with a high yield rate. This fabrication method is quite simple and eligible for the highly reproducible CNT probe fabrication.