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정상혁(Sang-Hyeok Jeong),고동신(Dong-Sin Ko),김원배(Won-Bae Kim),허덕재(Deok-Jae Heo),최재석(Jae-Seok Choi),현장환(Jang-Hwan Hyeon) 대한설비공학회 2011 대한설비공학회 학술발표대회논문집 Vol.2011 No.7
This paper describe develope of analog accelerometer with CAE analysis. In this paper, sensors case was constructed that was fixed on the vertical axis. and the case design and adjustment were based on the CAE analysis for performance improvements. most MEMS accelerometer chip is detected accelerations on the horizontal axis. but general CMS application need to detect vertical accelerations. this paper develope vertical sensing accelerometer that has resonent frequency of about 18kHz and sensitivity of about 120mV/g.