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An Experimental Study on Wafer Demounting by Water Jet in a Waxless Silicon Wafer Mounting System
Kim, Kyoung-Jin,Kwak, Ho-Sang,Park, Kyoung-Seok The Korean Society Of SemiconductorDisplay Technol 2009 반도체디스플레이기술학회지 Vol.8 No.2
In the silicon wafer polishing process, the mounting stage of silicon wafer on the ceramic carrier block has been using the polishing template which utilizes the porous surface instead of traditional wax mounting method. Here in this article, the experimental study is carried out in order to study the wafer demounting by water jet and the effects of operating conditions such as the water jet flowrate and the number of water jet nozzles on the wafer demounting time. It is found that the measured wafer demounting time is inversely proportional to the water flowrate per nozzle, regardless of number of nozzles used; implying that the stagnation pressure by the water jet impingement is the dominant key factor. Additionally, by using the transparent disk instead of wafer, the air bubble formation and growth is observed under the disk, making the passage of water flow, and subsequently demounting the wafer from the porous pad.
Simulation of outgassing effects of vacuum materials on vacuum characteristics
Kim, Hyung-Taek,Kim, Young-Suk The Korean Society Of SemiconductorDisplay Technol 2009 반도체디스플레이기술학회지 Vol.8 No.1
The outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the TMP system than in the DP system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.
Improved Inference for Human Attribute Recognition using Historical Video Frames
Ha, Hoang Van,Lee, Jong Weon,Park, Chun-Su The Korean Society Of SemiconductorDisplay Technol 2021 반도체디스플레이기술학회지 Vol.20 No.3
Recently, human attribute recognition (HAR) attracts a lot of attention due to its wide application in video surveillance systems. Recent deep-learning-based solutions for HAR require time-consuming training processes. In this paper, we propose a post-processing technique that utilizes the historical video frames to improve prediction results without invoking re-training or modifying existing deep-learning-based classifiers. Experiment results on a large-scale benchmark dataset show the effectiveness of our proposed method.
Ultraviolet-emissive BaSiO<sub>3</sub>:Ce<sup>3+</sup> Phosphor for VUV Excimer Lamp
Lee, Jugyeong,Afandi, Mohammad M.,Kim, Jongsu,Heo, Hoon The Korean Society Of SemiconductorDisplay Technol 2021 반도체디스플레이기술학회지 Vol.20 No.2
Ultraviolet (UVA)-emissive BaSiO<sub>3</sub>:Ce<sup>3+</sup> phosphor was astonishingly reproducible by vacuum-sintering at a high temperature through a simple solid-state reaction method. It was conveniently formed in BaSiO<sub>3</sub> phases. The compound showed the UVA emission and the UV-VUV excitation due to 5d-4f transitions from Ce<sup>3+</sup> ions: emission peak at 380 nm with a 56 nm width. Its temperature dependence and vacuum UV excitability were examined for practical application as an excimer discharge lamp, which showed the high thermal stability (80% at 100℃) and the strong VUV excitations at 145 nm and 172 nm.
Selective Laser Direct Patterning of Indium Tin Oxide on Transparent Oxide Semiconductor Thin Films
Lee, Haechang,Zhao, Zhenqian,Kwon, Sang Jik,Cho, Eou Sik The Korean Society Of SemiconductorDisplay Technol 2019 반도체디스플레이기술학회지 Vol.18 No.4
For a wider application of laser direct patterning, selective laser ablation of indium tin oxide (ITO) film on transparent oxide semiconductor (TOS) thin film was carried out using a diode-pumped Q-switched Nd:YVO4 laser at a wavelength of 1064 nm. In case of the laser ablation of ITO on indium gallium zinc oxide (IGZO) film, both of ITO and IGZO films were fully etched for all the conditions of the laser beams even though IGZO monolayer was not ablated at the same laser beam condition. On the contrary, in case of the laser ablation of ITO on zinc oxide (ZnO) film, it was possible to etch ITO selectively with a slight damage on ZnO layer. The selective laser ablation is expected to be due to the different coefficient of thermal expansion (CTE) between ITO and ZnO.
Kim, JunYoung,Jang, KyungMin,Joo, KangWo,Kim, KwangSun The Korean Society Of SemiconductorDisplay Technol 2013 반도체디스플레이기술학회지 Vol.12 No.4
In the semiconductor heat-treatment process, the temperature uniformity determines the film quality of a wafer. This film quality effects on the overall yield rate. The heat transfer of the wafer surface in the heat-treatment process equipment is occurred by convection and radiation complexly. Because of this, there is the nonlinearity between the wafer temperature and reactor. Therefore, the accurate prediction of temperature on the wafer surface is difficult without the direct measurement. The thermal camera and the T/C wafer are general ways to confirm the temperature uniformity on the heat-treatment process. As above ways have limit to measure the temperature in the precise domain under the micro-scale. In this study, we developed the thin film type temperature sensor using the MEMS technology to establish the system which can measure the temperature under the micro-scale. We combined the experiment and numerical analysis to verify and calibrate the system. Finally, we measured the temperature on the wafer surface on the semiconductor process using the developed system, and confirmed the temperature variation by comparison with the commercial T/C wafer.
An Implementation and Performance Evaluation of Fast Web Crawler with Python
Kim, Cheong Ghil The Korean Society Of SemiconductorDisplay Technol 2019 반도체디스플레이기술학회지 Vol.18 No.3
The Internet has been expanded constantly and greatly such that we are having vast number of web pages with dynamic changes. Especially, the fast development of wireless communication technology and the wide spread of various smart devices enable information being created at speed and changed anywhere, anytime. In this situation, web crawling, also known as web scraping, which is an organized, automated computer system for systematically navigating web pages residing on the web and for automatically searching and indexing information, has been inevitably used broadly in many fields today. This paper aims to implement a prototype web crawler with Python and to improve the execution speed using threads on multicore CPU. The results of the implementation confirmed the operation with crawling reference web sites and the performance improvement by evaluating the execution speed on the different thread configurations on multicore CPU.
Seo, Kwang-Kyu The Korean Society Of SemiconductorDisplay Technol 2011 반도체디스플레이기술학회지 Vol.10 No.3
This paper presents a novel method for image classification based on a hybrid genetic algorithm (GA) and support vector machine (SVM) approach which can significantly improve the classification performance for content-based image retrieval (CBIR). Though SVM has been widely applied to CBIR, it has some problems such as the kernel parameters setting and feature subset selection of SVM which impact the classification accuracy in the learning process. This study aims at simultaneously optimizing the parameters of SVM and feature subset without degrading the classification accuracy of SVM using GA for CBIR. Using the hybrid GA and SVM model, we can classify more images in the database effectively. Experiments were carried out on a large-size database of images and experiment results show that the classification accuracy of conventional SVM may be improved significantly by using the proposed model. We also found that the proposed model outperformed all the other models such as neural network and typical SVM models.
Ahn, Young-Ki,Ahn, Duk-Min,Yang, Ji-Chul,Kulkarni, Atul,Choi, Hoo-Mi,Kim, Tae-Sung The Korean Society Of SemiconductorDisplay Technol 2011 반도체디스플레이기술학회지 Vol.10 No.3
The performance of the DRAM is strongly dependent on the purity and surface roughness of the TIT (TiN/Insulator/ TiN) capacitor electrodes. Hence, in the present study, we evaluate the effects of organic contamination and change of surface roughness on the cylindrical TIT capacitor electrodes during the wet cleaning process by various analytical techniques such as TDMS, AFM, XRD and V-SEM. Once the sacrificial oxide and PR (Photo Resist) are removed by HF, the organic contamination and surface oxide films on the bottom Ti/TiN electrode become visible. With prolonged HF process, the surface roughness of the electrode is increased, whereas the amount of oxidized Ti/TiN is reduced due to the HF chemicals. In the 80nm DRAM device fabrication, the organic contamination of the cylindrical TIT capacitor may cause defects like SBD (Storage node Bridge Defect). The SBD fail bit portion is increased as the surface roughness is increased by HF chemicals reactions.
Jung, Yu Sup,Choi, Myung Kyu,Kim, Kyung Hwan The Korean Society Of SemiconductorDisplay Technol 2012 반도체디스플레이기술학회지 Vol.11 No.1
Al doped ZnO (AZO) thin film was deposited by using Facing Target Sputtering (FTS) system. This work examined the properties of AZO thin film as a function of the substrate temperature. The sputtering targets were 4 inch diameter disks of AZO (ZnO : $Al_2O_3$ = 98 : 2 wt.% ). The properties of electrical, structural and optical were investigated by 4-point probe, Hall effect measurement, x-ray diffractometer (XRD), field-emitting scanning electron microscopy (FE-SEM), and UV/VIS spectrometer. The lowest resistivity of films was $5.67{\times}10^{-4}{\Omega}.cm$ and the average optical transmittance of the films was above 85% in the visible range.