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HCl과 H2O2를 이용한 폐 FeCl3 에칭액의 재생
탁용석 ( Yong Sug Tak ),이호연 ( Ho Yeon Lee ),안은샘 ( Eun Saem Ahn ),박창현 ( Chang Htun Park ) 한국공업화학회 2013 공업화학 Vol.24 No.1
철, 구리, 알루미늄 등과 같은 금속의 에칭액으로 사용되는 FeCl3 용액의 에칭능력은 에칭 과정에서 Fe 3+이 Fe 2+로 환원 되면서 감소하게 된다. 에칭능력의 감소는 에칭 속도에 영향을 주기 때문에 시간당 제거되는 금속의 양이 감소하여 에칭 효율이 저하되며, 폐 FeCl3 용액은 환경에 유해하며, 처리시 경제적인 문제점을 지니고 있다. 본 연구에서는 폐 FeCl3 에칭액에 HCl 첨가 후 O2, H2O2 등과 같은 강한 산화제를 이용한 에칭액 재생 방법과 재생된 에칭액을 이용한 금속 에칭시 산화-환원 전위(ORP) 및 에칭능력과의 관계를 조사하였다. 연구 결과 폐 FeCl3 에칭액 대비 2 vol%의 HCl과 미량의 H2O2를 이용하여 재생된 FeCl3의 에칭 능력이 향상되었으며, 재생액을 이용한 에칭시 에칭액내의 Fe 2+ , Fe 3+의 농도변화로 인하여 ORP를 기준으로 하는 방법보다 에칭시간을 일정하게 하는 것이 보다 효율적인 방법으로 제시되었다. FeCl3 has been used as an etchant for metal etching such as Fe, Cu, and Al. In the process of metal etching, Fe 3+ is reducted to Fe 2+ and the etching rate becomes slow and etching efficiency decreased. Waste FeCl3 etchant needs to be regenerated because of its toxicity and treatment cost. In this work, HCl was initially mixed with the waste FeCl3 and then, strong oxidants, such as O2 and H2O2, were added into the mixed solution to regenerate the waste etchant. During successive etching and regeneration processes, oxygen-reduction potential (ORP) was continuously measured and the relationship between ORP and etching capability was investigated. Regenerated etchant using a two vol% HCl of the total etchant volume and a very small amount of H2O2 was very effective in recovering etching capability. During the etching-regeneration process, the same oxygen-reduction potential variation cannot be repeated every cycle since concentrations of Fe 2+ and Fe 3+ ions were continuously changed. It suggested that the control of etching-regeneration process based on the etching time becomes more efficient than that of the process based on oxygen reduction potential changes.
Transverse-mode-selectable microlens vertical-cavity surface-emitting laser
Chung, Il-Sug,Debernardi, Pierluigi,Lee, Yong Tak,Mørk, Jesper The Optical Society 2010 Optics express Vol.18 No.5
<P>A new vertical-cavity surface-emitting laser structure employing a thin microlens is suggested and numerically investigated. The laser can be made to emit in either a high-power Gaussian-shaped single-fundamental mode or a high-power doughnut-shaped higher-order mode. The physical origin of the mode selection properties of the new structure is rigorously analyzed and compared to other structures reported in the literature. The possibility of engineering the emission shape while retaining strong single mode operation is highly desirable for low-cost mid-range optical interconnects applications as well as the compact optical trapping of high-refractive-index dielectric particles and low-refractive-index, absorbing, or metallic particles.</P>
Initial Behaviors during Electrochemical ZnO Film Formation
Lee, Jae Young,Tak, Yong Sug 한국공업화학회 1999 Journal of Industrial and Engineering Chemistry Vol.5 No.2
A uniform ZnO thin film was cathodically deposited on indium-tin oxide electrode and the film formation mechanism was investigated. Fourier transform infrared spectra and in-situ mass changes by electrochemical quartz crystal microbalance demonstrated that soluble intermediates were formed in the initial stage of ZnO nucleation. Time resolved analysis of morphologies and mass changes in the film formation suggested a critical pH attainment for the nucleation of zinc oxide and the precipitation-dissolution mechanism in the film growth.
The Preparation of Yttrium Oxide Film Deposited by Electrochemical Method
Lee, Jae Young,Tak, Yong Sug 한국공업화학회 1999 Journal of Industrial and Engineering Chemistry Vol.5 No.2
Yttrium oxide films were prepared on indium-tin-oxide (ITO) by electrochemical method followed by heat treatment, During electrochemical reduction, a thin film of yttrium hydroxide was initially formed and vertically oriented growth bands were developed. Structural and morphological changes occurring during the deposition and dehydration of yttrium hydroxides were investigated by use of XRD, SEM and TG/DTA. The extent of dehydration increased with temperature. Y(OH)₃ phase transformed to α-Y(OH)₃ at about 400℃, and then Y₂O₃ above 450℃.